System and method for regenerating phosphoric acid solution, and apparatus and method for treating substrate

Patent metadata

Field	Value
Publication number	US-10083840-B2
Application number	US-201615166562-A
Country	US
Kind code	B2
Filing date	May 27, 2016
Priority date	May 29, 2015
Publication date	Sep 25, 2018
Grant date	Sep 25, 2018

Abstract

Disclosed is a method of regenerating a phosphoric acid solution from a treatment liquid including silicon (Si), hydrogen fluoride (HF), and phosphoric acid, the method including removing the silicon by supplying hydrogen fluoride corresponding to a preset amount or more to the treatment liquid, removing the hydrogen fluoride by heating the treatment liquid to a boiling point of hydrogen fluoride or higher, and adjusting a temperature and a concentration of the phosphoric acid to preset values.

First claim

What is claimed is:

1. A method for treating a substrate, comprising:
etching a silicon nitride film by supplying a treatment liquid comprising a first solution and a second solution onto the substrate;
measuring concentration of silicon in the treatment liquid;
determining whether the concentration of silicon in the treatment liquid exceeds a predetermined value; and
adding hydrogen fluoride to remove silicon from the treatment liquid in a case when it is determined that the concentration of silicon exceeds the predetermined value,
wherein the first solution comprises phosphoric acid, and the second solution comprises silicon, hydrogen fluoride, and phosphoric acid,
wherein a temperature of the first solution is higher than a temperature of the second solution, and
wherein the temperature of the first solution is 160° C. to 180° C., and the temperature of the second solution is 10° C. to 30° C.

2. The method of claim 1 , wherein the first solution and the second solution are supplied to the substrate after being inline-mixed.

3. The method of claim 1 , further comprising cooling down the treatment liquid after etching the silicon nitride film to a temperature lower than the temperature of the first solution.

4. The method of claim 3 , further comprising measuring a concentration of hydrogen fluoride and phosphoric acid in the cooled treatment liquid.

5. The method of claim 3 , wherein the temperature of the cooled treatment liquid is higher than the temperature of the second solution.

6. A method for treating a substrate, comprising:
etching a silicon nitride film by supplying a treatment liquid comprising a first solution and a second solution onto the substrate;
cooling down the treatment liquid after etching the silicon nitride film to a temperature lower than the temperature of the first solution;
measuring concentration of silicon in the treatment liquid;
determining whether the concentration of silicon in the treatment liquid exceeds a predetermined value; and
adding hydrogen fluoride to remove silicon from the treatment liquid in a case when it is determined that the concentration of silicon exceeds the predetermined value,
wherein the first solution comprises phosphoric acid, and the second solution comprises silicon, hydrogen fluoride, and phosphoric acid, and
wherein a temperature of the first solution is higher than a temperature of the second solution.

7. The method of claim 6 , wherein the first solution and the second solution are supplied to the substrate after being inline-mixed.

8. The method of claim 6 , further comprising measuring a concentration of hydrogen fluoride and phosphoric acid in the cooled treatment liquid.

9. The method of claim 6 , wherein the temperature of the cooled treatment liquid is higher than the temperature of the second solution.

Assignees

• Semes Co Ltd

Inventors

• Lee Seungho
• Cho Minhee
• Kang Ki-Moon
• Kim Tae-Keun

Classifications

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P50/283 Primary

  by chemical means · CPC title

• H10P72/0404

  for general liquid treatment, e.g. etching followed by cleaning · CPC title

• H10P70/60

  Cleaning only by mechanical processes · CPC title