Structure

Patent metadata

Field	Value
Publication number	US-10081576-B2
Application number	US-201715716865-A
Country	US
Kind code	B2
Filing date	Sep 27, 2017
Priority date	Nov 10, 2016
Publication date	Sep 25, 2018
Grant date	Sep 25, 2018

Abstract

According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity of rhombohedron detected near diffraction angle 2θ=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2θ=36.1° as r2, and taking a proportion γ1 as γ1(%)=r2/r1×100, the proportion γ1 is not less than 0% and less than 100%.

First claim

What is claimed is:

1. A structure including a polycrystalline substance of yttrium oxyfluoride as a main component, the yttrium oxyfluoride having a rhombohedral crystal structure, and an average crystallite size of the polycrystalline substance being less than 100 nanometers,
when taking a peak intensity of rhombohedron detected near diffraction angle 2θ=13.8° by X-ray diffraction as r1, taking a peak intensity of rhombohedron detected near diffraction angle 2θ=36.1° as r2, and taking a proportion γ1 as γ1(%)=r2/r1×100,
the proportion γ1 being not less than 0% and less than 100%.

2. The structure according to claim 1 , wherein
the proportion γ1 is less than 80%.

3. The structure according to claim 1 , wherein
the structure does not include yttrium oxyfluoride having an orthorhombic crystal structure, or
further includes yttrium oxyfluoride having the orthorhombic crystal structure,
when taking a peak intensity of orthorhombus detected near a diffraction angle 2θ=16.1° by X-ray diffraction as o, and taking a proportion of orthorhombus to rhombohedron as γ2(%)=o/r1×100, the proportion γ2 is not less than 0% and less than 100%.

4. The structure according to claim 1 , wherein
the yttrium oxyfluoride having the rhombohedral crystal structure is YOF.

5. The structure according to claim 3 , wherein
the yttrium oxyfluoride having the orthorhombic crystal structure is YOF of 1:1:2 (molar ratio is Y:O:F=1:1:2).

6. The structure according to claim 3 , wherein
the proportion γ2 is not more than 85%.

7. The structure according to claim 3 , wherein
the proportion γ2 is not more than 70%.

8. The structure according to claim 3 , wherein
the proportion γ2 is not more than 30%.

9. The structure according to claim 1 , wherein
the average crystallite size is less than 50 nanometers.

10. The structure according to claim 1 , wherein
the average crystallite size is less than 30 nanometers.

11. The structure according to claim 1 , wherein
the average crystallite size is less than 20 nanometers.

12. The structure according to claim 1 , wherein
when taking a peak intensity detected near diffraction angle 2θ=29.1° by X-ray diffraction as ε, at least one of a proportion of the ε to the r1 and a proportion of the ε to the r2 is less than 1%.

13. The structure according to claim 1 , wherein
when taking a peak intensity detected near diffraction angle 2θ=29.1° by X-ray diffraction as ε, at least one of a proportion of the ε to the r1 and a proportion of the ε to the r2 is 0%.

Assignees

• Toto Ltd

Inventors

• Ashizawa Hiroaki
• Kiyohara Masakatsu

Classifications

• C04B2235/9669

  Resistance against chemicals, e.g. against molten glass or molten salts · CPC title

• C04B2235/3225

  Yttrium oxide or oxide-forming salts thereof · CPC title

• C04B35/62218

  obtaining ceramic films, e.g. by using temporary supports · CPC title

• C04B35/553

  based on fluorides · CPC title

• C04B35/62222

  obtaining ceramic coatings (coating of mortars, concrete, artificial or natural stone or ceramics C04B41/45; laminated ceramic products B32B18/00; coating of glass C03C17/00, applying ceramic coatings on silicon for semi-conductor purposes H10W; coating metallic materials C23) · CPC title