Resistor fins

Patent metadata

Field	Value
Publication number	US-10079229-B1
Application number	US-201715495197-A
Country	US
Kind code	B1
Filing date	Apr 24, 2017
Priority date	Apr 24, 2017
Publication date	Sep 18, 2018
Grant date	Sep 18, 2018

Abstract

A technique relates to forming resistor fins on a substrate. A shallow trench isolation material is formed on dummy fins and the substrate, and the dummy fins are formed on the substrate. Predefined ones of the dummy fins are removed, thereby forming voids in the shallow trench isolation material corresponding to previous locations of the predefined ones of the dummy fins. A first material is deposited into the voids. The height of the first material is reduced, thereby forming trenches in the shallow trench isolation material. A second material is deposited into the trenches to be on top of the first material, thereby forming the resistor fins of a resistor device. A metal contact layer is formed so as to contact a top surface of the first material at predefined locations.

First claim

What is claimed is:

1. A method for forming resistor fins on a substrate, the method comprising:
forming a shallow trench isolation material on dummy fins and the substrate, the dummy fins being formed on the substrate;
removing predefined ones of the dummy fins, thereby forming voids in the shallow trench isolation material corresponding to previous locations of the predefined ones of the dummy fins;
depositing a first material into the voids;
reducing a height of the first material, thereby forming trenches in the shallow trench isolation material;
depositing a second material into the trenches, the second material being on top of the first material, thereby forming the resistor fins of a resistor device; and
forming a metal contact layer so as to contact a top surface of the first material at predefined locations.

2. The method of claim 1 , wherein the first material is a resistive material with a resistivity value.

3. The method of claim 1 , wherein a field-effect-transistor is formed at a same time as forming the resistor device.

4. The method of claim 3 , wherein the field-effect-transistor includes one of the resistor fins.

5. The method of claim 4 , wherein the field-effect-transistor includes source/drain regions formed on the dummy fins.

6. The method of claim 1 , wherein the first material comprises a doped polysilicon material.

7. The method of claim 1 , wherein the second material comprises an electrically-isolating insulator.

8. The method of claim 1 , wherein the metal contact layer comprises a work function setting layer.

9. A method of forming a resistor fin device and a field-effect-transistor on a substrate, the method comprising:
forming a shallow trench isolation material on sacrificial fins and the substrate, the sacrificial fins being formed on the substrate;
removing the sacrificial fins in the resistor fin device while removing one of the sacrificial fins in the field-effect-transistor, thereby forming voids in the shallow trench isolation material corresponding to previous locations of the sacrificial fins having been removed;
forming a first material into the voids, the first material having a height that forms trenches in the shallow trench isolation material;
forming a second material into the trenches, the second material being on top of the first material;
forming a gate and source/drain regions in the field-effect-transistor; and
forming a metal contact layer so as to contact the first material at predefined locations in the resistor fin device and to contact source/drain regions in the field-effect-transistor.

10. The method of claim 9 , wherein the first material is a doped polysilicon material.

11. The method of claim 9 , wherein the second material is an electrically-isolating insulator material.

12. The method of claim 9 , wherein the first material is a resistive material with a resistivity value.

Assignees

• IBM

Inventors

• Bi Zhenxing
• Cheng Kangguo
• Li Juntao
• Xu Peng

Classifications

• H10W10/17

  formed using trench refilling with dielectric materials, e.g. shallow trench isolations · CPC title

• H10W10/014

  using trench refilling with dielectric materials, e.g. shallow trench isolations · CPC title

• H01L21/76224

  Electricity · mapped topic

• H01L21/823481

  Electricity · mapped topic

• H01L28/20

  Electricity · mapped topic