Circuit for detection of failure of a movable MEMS mirror

Patent metadata

Field	Value
Publication number	US-10078032-B2
Application number	US-201615188455-A
Country	US
Kind code	B2
Filing date	Jun 21, 2016
Priority date	Jun 21, 2016
Publication date	Sep 18, 2018
Grant date	Sep 18, 2018

Abstract

Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes an integrator receiving an opening angle signal representing an opening angle of the movable MEMS mirror, and a differentiator receiving the opening angle signal. A summing circuit is configured to sum the integrator output and the differentiator output. A comparison circuit is configured to determine whether the sum of the integrator output and differentiator output is not within a threshold window. An indicator circuit is configured to generate an indicator signal indicating that the movable MEMS mirror has failed based on the comparison circuit indicating that the sum of the integrator output and differentiator output is not within the threshold window.

First claim

The invention claimed is:

1. A circuit for determining failure of a movable MEMS mirror, comprising:
an integrator configured to receive as input an opening angle signal representing an opening angle of the movable MEMS mirror and to generate an integrator output;
a differentiator configured to receive as input the opening angle signal and to generate a differentiator output;
a summing circuit configured to sum the integrator output and the differentiator output;
a comparison circuit configured to determine whether the sum of the integrator output and differentiator output is not within a threshold window; and
an indicator circuit configured to generate an indicator signal indicating that the movable MEMS mirror has failed based on the comparison circuit indicating that the sum of the integrator output and differentiator output is not within the threshold window.

2. The circuit of claim 1 , further comprising a first automatic gain control circuit configured to control a gain of the integrator output prior to receipt of the integrator output by the summing circuit, and a second automatic gain control circuit configured to control a gain of the differentiator output prior to receipt of the differentiator output by the summing circuit.

3. The circuit of claim 1 , further comprising a low pass filter configured to receive an unfiltered opening angle signal and to generate the opening angle signal in response thereto.

4. The circuit of claim 1 , wherein the integrator comprises an analog integrating amplifier having an input terminal coupled to a signal node to receive therefrom the opening angle signal, and having an output terminal.

5. The circuit of claim 4 , wherein the differentiator comprises an analog differentiating amplifier having an input terminal coupled to the signal node to receive therefrom the opening angle signal, and having an output terminal.

6. The circuit of claim 5 , wherein the summing circuit comprises a voltage divider coupled between the output terminal of the analog integrating amplifier and the output terminal of the analog differentiating amplifier, and having a central output node indicating the sum of the integrator output and the differentiator output.

7. The circuit of claim 1 , wherein the threshold window includes an upper threshold level above which failure of the movable MEMS mirror is presumed; wherein the comparison circuit comprises a first analog comparator having an input terminal coupled the comparison circuit and having an output terminal, the first analog comparator configured to compare the sum of the integrator output and the differentiator output to the upper threshold level.

8. The circuit of claim 7 , wherein the comparison circuit further comprises a second analog comparator having an input terminal coupled to the comparison circuit and having an output terminal, and configured to compare the sum of the integrator output and the differentiator output to a lower threshold level of the threshold window below which failure of the movable MEMS mirror is presumed.

9. The circuit of claim 8 , wherein the comparison circuit further comprises a NOR gate having a first input terminal coupled to the output terminal of the first comparator, a second input terminal coupled to the output terminal of the second comparator, and an output terminal.

10. The circuit of claim 9 , wherein the indicator circuit comprises a timer circuit having a reset terminal coupled to the output terminal of the NOR gate and having an output terminal; wherein the timer circuit is configured to begin counting based on receiving an assertion from the NOR gate, to be reset based on receiving a deassertion from the NOR gate, and to generate the indicator signal after reaching a predetermined count number.

11. The circuit of claim 10 , wherein the indicator circuit further comprises a flip flop having an input terminal coupled to the output terminal of the indicator circuit, the indicator circuit configured to be set to generate an alarm based upon assertion of the indicator signal received from the timer circuit.

12. A circuit, comprising:
an analog integrating amplifier having a non-inverting terminal coupled to ground, an inverting terminal coupled to a movable MEMS mirror opening angle signal node, and an output terminal;
an analog differentiating amplifier having a non-inverting terminal coupled to ground, an inverting terminal coupled to a movable MEMS mirror opening angle signal node, and an output terminal;
an analog summer having a first input terminal coupled to the output terminal of the analog integrating amplifier, a second input terminal coupled to the output terminal of the analog differentiating amplifier, and an output terminal;
a window comparator having a first input terminal coupled to a positive threshold reference, a second input terminal coupled to the output terminal of the analog summer, a third input terminal coupled to a negative threshold reference, a fourth input terminal coupled to the output terminal of the analog summer, and first and second output terminals;
a NOR gate having a first input terminal coupled to the first output terminal of the window comparator, a second input terminal coupled to the second output terminal of the window comparator, and an output terminal.

13. The circuit of claim 12 , wherein the window comparator comprises:
a first comparator having an inverting terminal coupled to the positive threshold reference, a non-inverting terminal coupled to the output terminal of the analog summer, and an output terminal; and
a second comparator having an non-inverting terminal coupled to the negative threshold reference, an inverting terminal coupled to the output terminal of the analog summer, and an output terminal.

14. The circuit of claim 12 , wherein the analog integrating amplifier has associated therewith an input resistor coupled between the movable MEMS mirror opening angle signal node and the inverting terminal, a capacitor coupled between the inverting terminal and the output terminal, and a feedback resistor coupled between the inverting terminal and the output terminal.

15. The circuit of claim 12 , wherein the analog differentiating amplifier has associated therewith an input capacitor coupled between the movable MEMS mirror opening angle signal node and the inverting terminal and a feedback resistor coupled between the inverting terminal and the output terminal.

16. The circuit of claim 12 , wherein the analog summer comprises a first resistor coupled between the output terminal of the analog integrating amplifier and a central output node, and a second resistor coupled between the output terminal of the analog differentiating amplifier and the central output node.

17. A method, comprising:
integrating an opening angle signal representing an opening angle of a movable MEMS mirror, using an integrator circuit;
differentiating the opening angle signal, using a differentiator circuit;
summing the integrated opening angle signal and the differentiated opening angle signal, using a summing circuit;
determining whether the sum of the integrated opening angle signal and the differentiated opening angle signal is greater than an upper threshold level or lower than a lower threshold level, using a comparison circuit; and
generating an indicator signal indicating that the movable MEMS mirror has failed based on the sum of the integrated opening angle signal and differentiated opening angle signal being greater than the upper threshold level or lower than the lower threshold level, using an indicator circuit.

Assignees

• St Microelectronics Ltd

Inventors

• Sourani Sason

Classifications

• G01M11/005 Primary

  Testing of reflective surfaces, e.g. mirrors · CPC title

• G08B21/185

  Electrical failure alarms · CPC title

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• B81B3/00

  Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence) · CPC title

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title