Methods and devices for detecting open and/or shorts circuits in mems micro-mirror devices

Patent metadata

Field	Value
Publication number	US-2016255318-A1
Application number	US-201315026553-A
Country	US
Kind code	A1
Filing date	Nov 22, 2013
Priority date	Nov 22, 2013
Publication date	Sep 1, 2016
Grant date	—

Abstract

According to the present invention there is provided methods and devices for detecting open and/or short circuits in MEMS micro-mirror devices, which use relative comparisons of voltage levels within the MEMS micro-mirror devices for detecting the occurrence of open and/or short circuits.

First claim

1 - 15 . (canceled)

16 . An apparatus comprising:
a microelectromechanical system (MEMS) mirror comprising:
a mirror; and
a conduction coil to conduct a current and apply a force to the mirror to oscillate the mirror about at least one axis;
a power supply circuit electrically coupled to the MEMS mirror, the power supply circuit to selectively apply voltage to a first side of the conduction coil or a second side of the conduction coil; a current source electrically coupled to the power supply circuit; and a comparator to compare a voltage at the first and second side of the conduction coil to a voltage across the current source to detect an open circuit in the MEMS mirror.

17 . The apparatus of claim 16 , the power supply circuit comprising an H bridge circuit.

18 . The apparatus of claim 17 , the comparator comprising:
an OR gate having at least a first and a second input; a first comparator coupled to the first input of the OR gate; and a second comparator coupled to the second input of the OR gate.

19 . The apparatus of claim 18 , wherein the voltage at the first side of the conduction coil and the voltage across the current source are inputs to the first comparator and the voltage at the second side of the conduction coil and the voltage across the current source are inputs to the second comparator.

20 . The apparatus of claim 18 , the current source comprising a first and a second transistor electrically connected in series, wherein the voltage at the first side of the conduction coil and the voltage at a junction between the first and second transistors are inputs to the first comparator and the voltage at the second side of the conduction coil and the voltage at the junction between the first and second transistors are inputs to the second comparator.

21 . The apparatus of claim 17 , the current source comprising a first and a second transistor electrically connected in series, the comparator to compare a voltage at the first and second side of the conduction coil to a voltage at a junction between the first and second transistors.

22 . The apparatus of claim 21 , wherein the voltage across the first and second transistors and the voltage at a junction between the first and second transistors are inputs to the comparator.

23 . The apparatus of claim 17 , the comparator comprising:
an XNOR gate having at least a first and a second input; a first comparator coupled to the first input of the XNOR gate; and a second comparator coupled to the second input of the XNOR gate, wherein the voltage at the first side of the conduction coil and the voltage at the second side of the conduction coil are inputs to the first comparator and the voltage at the first side of the conduction coil and the voltage at the second side of the conduction are inputs to the second comparator.

24 . The apparatus of claim 17 , the comparator to compare the voltage across the current source to a reference voltage to detect an open circuit in the MEMS mirror.

25 . The apparatus of claim 17 , the comparator comprising:
a buffer electrically connected to a junction between the H bridge and the current source; and a low pass filter which is electrically connected to the junction between the H bridge and current source, wherein the comparator to compare an output of the buffer to an output of the low pass filter.

26 . A method comprising:
determining a first voltage at a first side of a conduction coil of a microelectromechanical system (MEMS) mirror, the conduction coil to conduct a current and apply a force to a mirror element of the MEMS mirror to oscillate the mirror element about at least one axis; determining a second voltage at a second side of the conduction coil; comparing the first voltage and the second voltage; and detecting a change in the comparison to detect an open circuit in the MEMS mirror.

27 . The method of claim 26 , the conduction coil to be driven by a current source comprising a first and a second transistor operably coupled in series, the method comprising:
comparing a voltage across the first and second transistors to a voltage at a junction between the first and second transistors; and detecting a change in comparison of the voltage across the first and second transistors to the voltage at a junction between the first and second transistors to detect an open circuit in the MEMS mirror.

28 . The method of claim 26 , the conduction coil to be driven by a current source, the method comprising:
comparing a voltage across the current source to a reference voltage; and detecting a change in comparison of the voltage across the current source to the reference voltage to detect an open circuit in the MEMS mirror.

29 . The method of claim 28 , wherein the reference voltage is an average value of the voltage across the current source over a predefined period of time.

30 . A system comprising:
a light source to emit a light beam; a microelectromechanical system (MEMS) mirror, the MEMS mirror comprising:
a mirror to receive the light beam and reflect the light beam; and
a conduction coil to conduct a current and apply a force to the mirror to oscillate the mirror about at least one axis;
a power supply circuit electrically coupled to the MEMS mirror, the power supply circuit to selectively apply voltage to a first side of the conduction coil or a second side of the conduction coil; a current source electrically coupled to the power supply circuit; and a comparator to compare a voltage at the first and second side of the conduction coil to a voltage across the current source to detect an open circuit in the MEMS mirror.

31 . The system of claim 30 , comprising a controller to send a control signal to the light source to turn off the light based on a detection of an open circuit in the MEMS mirror.

32 . The system of claim 30 , the power supply circuit comprising an H bridge circuit.

33 . The system of claim 32 , the comparator comprising:
an OR gate having at least a first and a second input; a first comparator coupled to the first input of the OR gate; and a second comparator coupled to the second input of the OR gate.

34 . The system of claim 32 , the comparator comprising:
an XNOR gate having at least a first and a second input; a first comparator coupled to the first input of the XNOR gate; and a second comparator coupled to the second input of the XNOR gate, wherein the voltage at the first side of the conduction coil and the voltage at the second side of the conduction coil are inputs to the first comparator and the voltage at the first side of the conduction coil and the voltage at the second side of the conduction are inputs to the second comparator.

35 . The system of claim 32 , the comparator comprising:
a buffer electrically connected to a junction between the H bridge and the current source; and a low pass filter which is electrically connected to the junction between the H bridge and current source, wherein the comparator to compare an output of the buffer to an output of the low pass filter.

Assignees

• Intel Corp

Inventors

• Chevallaz Eric
• Abele Nicolas

Classifications

• G01R31/50

  Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections (testing of sparking plugs H01T13/58) · CPC title

• H04N9/3194 Primary

  including sensor feedback · CPC title

• H03K19/215

  using field-effect transistors · CPC title

• H04N9/3135

  Driving therefor · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title