Fabrication and harvest of piezoelectric plates

Patent metadata

Field	Value
Publication number	US-10069061-B2
Application number	US-201615171521-A
Country	US
Kind code	B2
Filing date	Jun 2, 2016
Priority date	Jun 2, 2016
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

A method is provided for fabricating piezoelectric plates. A sacrificial layer is formed overlying a growth substrate. A template layer, with openings exposing sacrificial layer surfaces, is formed over the sacrificial layer. An adhesion layer/first electrode stack is selectively deposited in the openings overlying the sacrificial layer surfaces, and a piezoelectric material formed in the openings overlying the stack. Then, a second electrode is formed overlying the piezoelectric material. Using the second electrode as a hardmask, the piezoelectric material is etched to form polygon-shaped structures, such as disks, attached to the sacrificial layer surfaces. After removing the template layer and annealing, the polygon-shaped structures are separated from the sacrificial layer. With the proper choice of growth substrate material, the annealing can be performed at a relatively high temperature.

First claim

We claim:

1. A fluidic assembly solution of piezoelectric plates comprising:
a solution;
a plurality of piezoelectric plates suspended in the solution, each plate comprising:
a planar first electrode comprising an adhesion layer/first electrode material stack;
a piezoelectric material overlying the first electrode material; and,
a planar second electrode overlying the piezoelectric material.

2. The fluidic assembly solution of claim 1 wherein the piezoelectric material is selected from a group consisting of lead zirconium titanate (PZT), barium titanate (BaTiO 3 ), polyvinylidene fluoride (PVDF), polyvinylidene fluoride co-polymers (P(VDF-TrFE), quartz, zinc oxide (ZnO), aluminum nitride (AlN), or lanthanum-doped lead zirconium titanate (PZLT).

3. The fluidic assembly solution of claim 1 wherein the first electrode material is selected from a group consisting of platinum (Pt), palladium (Pd), ruthenium oxide (RuO 2 ), or gold (Au); and,
wherein the second electrode material is selected from a group consisting of Pt, Pd, RuO 2 , or Au.

4. The fluidic assembly solution of claim 1 wherein the adhesion layer is a material selected from a group consisting of titanium (Ti), nickel (Ni), or chromium (Cr).

5. The fluidic assembly solution of claim 1 wherein the piezoelectric plates have a polygon shape.

6. The fluidic assembly solution of claim 1 wherein the piezoelectric plates have a disk shape.

7. The fluidic assembly solution of claim 1 wherein particles in the piezoelectric material are polarized in the same direction.

8. The fluidic assembly solution of claim 1 wherein the piezoelectric plates are annealed piezoelectric plates, annealed at a temperature of greater than 650° C.

9. The fluidic assembly solution of claim 1 wherein the piezoelectric plates are twice-annealed piezoelectric plates, initially annealed at a temperature of greater than 450° C., and subsequently annealed at a temperature of greater than 650° C.

Assignees

• Elux Inc

Inventors

• Crowder Mark Albert
• Zhan Changqing
• Nishimura Karen
• Schuele Paul

Classifications

• H01L41/332 Primary

  Electricity · mapped topic

• H01L41/193

  Electricity · mapped topic

• H01L41/1873

  Electricity · mapped topic

• H01L41/1876

  Electricity · mapped topic

• H01L41/1871

  Electricity · mapped topic