Measurement device, method, and recording medium

Patent metadata

Field	Value
Publication number	US-10067057-B2
Application number	US-201313860034-A
Country	US
Kind code	B2
Filing date	Apr 10, 2013
Priority date	Apr 25, 2012
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

According to the present invention, a measurement device includes an electromagnetic wave detector, a phase measurement unit and a deriving unit. The electromagnetic wave detector detects an electromagnetic wave having a frequency equal to or more than 0.02 THz and equal to or less than 12 THz having traveled inside an object to be measured, which is an aggregation of particles. The phase measurement unit measures a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector. The deriving unit derives hardness or porosity of the object to be measured based on a measurement result by the phase measurement unit.

First claim

The invention claimed is:

1. A measurement device comprising:
an electromagnetic wave detector that detects an electromagnetic wave having a frequency equal to or more than 0.02 THz and equal to or less than 12 THz having traveled inside an object to be measured, which is an aggregation of particles;
a phase measurer that measures a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector;
a deriver that derives hardness or porosity of the object to be measured based on a measurement result itself by the phase measurer, said measurement result is a result itself and not a refractive index of the object to be measured; and
a thickness measurer that measures a thickness of the object to be measured.

2. A measurement method with using a measurement device having an electromagnetic wave detector that detects an electromagnetic wave having a frequency equal to or more than 0.02 THz and equal to or less than 12 THz having traveled inside an object to be measured, which is an aggregation of particles, the method comprising:
measuring a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector;
deriving hardness or porosity of the object to be measured based on a measurement result itself by the measuring, said measurement result is a result itself and not a refractive index of the object to be measured; and
measuring, via a thickness measurer, a thickness of the object to be measured.

3. A computer-readable medium having a program of instructions for execution by a computer to perform a measurement process using a measurement device having an electromagnetic wave detector that detects an electromagnetic wave having a frequency equal to or more than 0.02 THz and equal to or less than 12 THz having traveled inside an object to be measured, which is an aggregation of particles, the measurement process comprising:
measuring a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector;
deriving hardness or porosity of the object to be measured based on a measurement result itself by the measuring, said measurement result is a result itself and not a refractive index of the object to be measured; and
measuring, via a thickness measurer, a thickness of the object to be measured.

Assignees

• Advantest Corp

Inventors

• Kato Eiji

Classifications

• G01N2015/0092

  Monitoring flocculation or agglomeration · CPC title

• G01N2203/0076

  Hardness, compressibility or resistance to crushing · CPC title

• G01N33/15

  Medicinal preparations {; Physical properties thereof, e.g. dissolubility} · CPC title

• G01N3/40 Primary

  Investigating hardness or rebound hardness · CPC title

• G01N21/3581

  using far infrared light; using Terahertz radiation · CPC title