Dynamic measurement of material properties using terahertz radiation with real-time thickness measurement for process control
US-2015323452-A1 · Nov 12, 2015 · US
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Kato Eiji patents
Kato Eiji is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kato Eiji |
| Total patents | 1 |
| First publication | Nov 12, 2015 |
| Latest publication | Nov 12, 2015 |
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Major assignees
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| Assignee | Patents |
|---|---|
| Advantest Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/3563 | 1 |
| G01N2201/0692 | 1 |
| G01N33/15 | 1 |
| G01B11/06 | 1 |
| G01N2201/061 | 1 |