Method of preparing trichlorosilan

Patent metadata

Field	Value
Publication number	US-10065864-B2
Application number	US-201515318026-A
Country	US
Kind code	B2
Filing date	Jul 21, 2015
Priority date	Jul 22, 2014
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

Provided is a method of preparing trichlorosilane, more particularly, a method of preparing trichlorosilane which trichlorosilane can be obtained with an improved yield using a catalyst-supported silicon.

First claim

What is claimed is:

1. A method of preparing trichlorosilane, the method comprising:
supporting a first metal catalyst inside metallurgical silicon (MG-Si);
supporting a second metal catalyst on the metallurgical silicon; and
supplying silicon tetrachloride and hydrogen to the first and the second metal catalysts-supported metallurgical silicon to conduct a hydrochlorination reaction,
wherein the first metal catalyst is selected from the group consisting of copper (Cu), nickel (Ni), cobalt (Co), platinum (Pt), gold (Au), ruthenium (Ru), and palladium (Pd), and the second catalyst is selected from the group consisting of copper (Cu), nickel (Ni), cobalt (Co), platinum (Pt), gold (Au), ruthenium (Ru), and palladium (Pd), and
wherein the first and second metal catalysts are different from each other.

2. The method of claim 1 , wherein the step of supporting the first metal catalyst inside the metallurgical silicon comprises the steps of injecting a precursor compound of the first metal catalyst into the metallurgical silicon at a temperature higher than a melting point of the metallurgical silicon; and decreasing the temperature to room temperature.

3. The method of claim 1 , wherein the step of supporting the second metal catalyst on the metallurgical silicon and the step of conducting a hydrochlorination reaction are performed at the same time.

4. The method of claim 1 , wherein the step of supporting the second metal catalyst on the metallurgical silicon is performed by mixing the first metal catalyst-supported metallurgical silicon with a precursor compound of the second metal catalyst, and then performing heat treatment at a temperature higher than a melting point of the precursor compound of the second metal catalyst.

5. The method of claim 1 , wherein the first metal catalyst is supported in an amount of 0.01 to 10% by weight relative to the total weight of the metallurgical silicon.

6. The method of claim 1 , wherein the second metal catalyst is supported in an amount of 0.01 to 20% by weight relative to the total weight of the metallurgical silicon.

7. The method of claim 1 , wherein the metallurgical silicon has an average particle size of 10 to 500 μm.

8. The method of claim 1 , wherein the step of conducting a hydrochlorination reaction is performed at a temperature of 300 to 800° C. and at a pressure of 1 to 50 bar.

9. The method of claim 1 , wherein silicon tetrachloride and hydrogen are supplied at a molar ratio of 1:5 to 1:2 in the step of conducting a hydrochlorination reaction.

Assignees

• Hanwha Chemical Corp

Inventors

• Kim Gil Ho
• Kim Joon Hwan
• Park Kyu Hak
• Lee Dong Ho

Classifications

• C07F7/12

  Organo silicon halides · CPC title

• C01B33/107 Primary

  Halogenated silanes · CPC title

• C01B33/06

  Metal silicides (alloys C22) · CPC title

• C01B33/10763 Primary

  from silicon · CPC title

• B01J23/72

  Copper · CPC title