Chemical mechanical polishing (CMP) platform for local profile control

Patent metadata

Field	Value
Publication number	US-10065288-B2
Application number	US-201514829995-A
Country	US
Kind code	B2
Filing date	Aug 19, 2015
Priority date	Feb 14, 2012
Publication date	Sep 4, 2018
Grant date	Sep 4, 2018

Abstract

A localized chemical mechanical polishing (CMP) platform is provided. A table is configured to support a workpiece with a to-be-polished surface. A polishing pad is spaced from the table with a width less than about half that of the table. The polishing pad is configured to individually polish rough regions of hillocks or valleys on the to-be-polished surface. A slurry distribution system is configured to apply slurry to an interface between the polishing pad and the workpiece. A cleaning system is configured to clean the workpiece in situ on the table. A drying system is configured to dry the workpiece in situ on the table. A method for CMP with local profile control and a system with local profile control are also provided.

First claim

What is claimed is:

1. A method for chemical mechanical polishing (CMP) with local profile control, the method comprising:
providing a workpiece having a to-be-polished surface, wherein the to-be-polished surface comprises a ring-shaped region, wherein the ring-shaped region comprises a first hillock and a second hillock circumferentially spaced, and wherein the ring-shaped region is smooth from the first hillock to the second hillock;
measuring a planarity of the to-be-polished surface of the workpiece to identify rough regions on the to-be-polished surface;
individually polishing the rough regions by pressing and rotating a polishing pad against the rough regions and applying slurry to interfaces between the polishing pad and the rough regions, wherein the polishing pad has a width less than about half that of the workpiece, wherein the individual polishing of the rough regions comprises pressing the polishing head against the to-be-polished surface at the first and second hillocks while releasing pressure against the to-be-polished surface where smooth;
after the individual polishing, cleaning the workpiece in situ without moving the workpiece from its location during the individual polishing; and
after the cleaning, drying the workpiece in situ without moving the workpiece from its location during the individual polishing and the cleaning.

2. The method according to claim 1 , further comprising:
initially polishing the to-be-polished surface of the workpiece before measuring the planarity of the to-be-polished surface.

3. The method according to claim 2 , wherein initially polishing the to-be-polished surface comprises:
performing a CMP process in which every location on the to-be-polished surface is subject to a common level of polishing.

4. The method according to claim 1 , wherein individually polishing the rough regions comprises:
controlling a temperature of the polishing pad to control a polishing rate of the polishing pad.

5. The method according to claim 1 , wherein individually polishing the rough regions comprises:
moving the polishing pad between the rough regions in two dimensions of a Cartesian coordinate system, relative to a reference feature on a table supporting the workpiece.

6. The method according to claim 1 , wherein individually polishing the rough regions comprises:
moving the polishing pad between the rough regions in two dimension of a polar coordinate system, relative to a reference feature on a table supporting the workpiece.

7. The method according to claim 1 , wherein measuring a planarity of a to-be-polished surface comprises:
determining distances between the to-be-polished surface and a sensor while the sensor is scanned across the to-be-polished surface.

8. The method according to claim 1 , wherein cleaning the workpiece comprises:
focusing energy or a fluid towards to the to-be-polished surface.

9. The method according to claim 1 , wherein drying the workpiece comprises:
applying a fluid to the to-be-polished surface.

10. A method for chemical mechanical polishing (CMP) with local profile control, the method comprising:
performing a coarse CMP to a surface of a workpiece by a coarse CMP platform, wherein the performing of the coarse CMP comprises loading the workpiece into a polishing head and pressing the surface against a first polishing pad with the polishing head, and wherein the first polishing pad has a width greater than that of the workpiece;
after the coarse CMP, measuring a planarity of the surface to identify rough regions of the surface, wherein the surface comprises a first hillock and a second hillock upon conclusion of the coarse CMP, and wherein the first and second hillocks are spaced by a substantially planar surface region of the surface;
performing a localized CMP to the surface of the workpiece by a local CMP platform, wherein the performing of the localized CMP comprises individually polishing the rough regions by pressing and rotating a second polishing pad against the rough regions and applying slurry to interfaces between the second polishing pad and the rough regions, wherein the second polishing pad has a width less than about half that of the workpiece, wherein the local CMP platform is independent of the coarse CMP platform, wherein the performing of the localized CMP comprises applying pressure to the surface at the first and second hillocks by pressing the second polishing pad against the first and second hillocks, and wherein the performing of the localized CMP further comprises releasing the pressure at the substantially planar surface region;
after the performing of the localized CMP, cleaning the workpiece in situ without moving the workpiece from its location during the localized CMP; and
drying the workpiece in situ without moving the workpiece from its location during the localized CMP and the cleaning.

11. The method according to claim 10 , wherein the performing of the localized CMP comprises:
controlling a temperature of the second polishing pad to control a polishing rate of the second polishing pad.

12. The method according to claim 10 , wherein the performing of the localized CMP comprises:
moving the second polishing pad between the rough regions in two dimensions of a Cartesian coordinate system, relative to a reference feature on a table supporting the workpiece.

13. The method according to claim 12 , wherein the rough regions comprises a first rough region and a second rough region, and wherein the first and second rough regions are at different locations in each of the two dimensions.

14. The method according to claim 10 , wherein the measuring comprises:
determining distances between the surface of the workpiece and a sensor while the sensor is scanned laterally across the surface.

15. The method according to claim 10 , wherein the cleaning comprises focusing energy or a fluid towards to the surface of the workpiece, and wherein the drying comprises applying a fluid to the surface.

16. The method according to claim 10 , wherein the localized CMP does not polish smooth regions on the surface of the workpiece that are between the rough regions of the surface.

17. A method for chemical mechanical polishing (CMP), the method comprising:
performing a first CMP to a wafer surface of a wafer, wherein the wafer surface is substantially planar upon conclusion of the first CMP, wherein the wafer surface comprises a first non-planar feature and a second non-planar feature upon conclusion of the first CMP, and wherein the first and second non-planar features are spaced by a substantially planar surface region of the wafer surface;
analyzing the wafer surface to detect the first and second non-planar features of the wafer surface;
performing a second CMP to the wafer surface of the wafer, wherein the performing of the second CMP comprises:
providing a polishing pad comprising a pad surface, wherein the pad surface has a surface area smaller than a surface area of the wafer surface;
applying pressure to the first non-planar feature by pressing the pad surface against the first non-planar feature;
rotating the pad surface about a pad axis to locally planarize the first non-planar feature without performing localized planarization of the substantially planar surface region between the first and second non-planar features, wherein the pad axis is substantially perpendicular to the wafer surface;
moving the polishing pad to the second non-planar feature over the substantially planar surface region while maintaining contact of the polishing pad with the substantially plana

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wu Jiann Lih
• Yang Chi-Ming
• Hwang James Jeng-Jyi

Classifications

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P72/0422

  for wet etching · CPC title

• H10P52/402

  of semiconductor materials · CPC title