MEMS gas chromatograph and method of forming a separator column for a MEMS gas chromatograph

Patent metadata

Field	Value
Publication number	US-10060888-B2
Application number	US-201515535522-A
Country	US
Kind code	B2
Filing date	Dec 16, 2015
Priority date	Dec 17, 2014
Publication date	Aug 28, 2018
Grant date	Aug 28, 2018

Abstract

A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.

First claim

What is claimed is:

1. A method of forming a microelectromechanical system (MEMS) device, comprising:
providing a silicon-on-insulator (SOI) wafer including a base layer, a device layer above the base layer, and a buried oxide layer between the base layer and a lower surface of the device layer;
etching a plurality of trenches from an upper surface of the device layer to the buried oxide layer, the trenches spaced along a sequential path in the device layer;
releasing a portion of the buried oxide layer through the trenches; and
annealing the SOI wafer to seal off the trenches at the upper and lower surfaces of the device layer so as to form (i) one or more atomic-smooth, continuous channels within the device layer and (ii) a cavity bounded by the base layer, the buried oxide layer, and the lower surface of the device layer.

2. The method of claim 1 , wherein:
the one or more atomic-smooth, continuous channels includes a first continuous channel and a second continuous channel, and
the device layer defines (i) a first ingress leading into the first continuous channel and a first egress leading out of first continuous channel and (ii) a second ingress leading into the second continuous channel and a second egress leading out of the second continuous channel.

3. The method of claim 2 , wherein:
the first continuous channel is disposed substantially along a first plane through the device layer,
the second continuous channel is disposed substantially along a second plane through the device layer, the second plane spaced from the first plane, and
the first egress of the first continuous channel is joined to the second ingress of the second continuous channel such that first and second continuous channels form a single continuous channel passing through the device layer.

4. The method of claim 1 , further comprising:
etching a trench portion from the upper surface of the device layer to the buried oxide layer, the trench portion encompassing a first portion of the device layer that includes the one or more atomic-smooth, continuous channels;
filling the trench portion with an oxide;
depositing a passivation layer above the device layer and the oxide-filled trench portion;
etching a plurality of vent holes through the passivation layer at locations corresponding to the oxide-filled trench portion;
releasing the oxide from within the trench portion to thermally decouple the first portion of the device layer from a second portion of the device layer; and
sealing the vent holes.

5. The method of claim 4 , wherein:
releasing the oxide from within the trench portion includes performing a hydrofluoric acid (HF) vapor etch release, and
sealing the vent holes includes performing a clean high temperature seal in an epi reactor.

6. The method of claim 1 , further comprising:
forming a spacer from the upper surface of the device layer to the buried oxide layer to electrically isolate a side electrode within the device layer prior to etching the plurality of trenches, the spacer positioned proximate to at least a portion of the one or more atomic-smooth continuous channels,
depositing a passivation layer above the device layer, the spacer and the side electrode;
patterning a portion of the passivation layer to expose the side electrode;
depositing a metal layer above the patterned passivation layer and the exposed side electrode; and
patterning the metal layer to form a metal portion that is in electrical communication with the side electrode, the metal portion and the side electrode enabling electrostatic biasing of a material conveyed through the one or more atomic-smooth, continuous channels.

7. The method of claim 1 , further comprising:
depositing a passivation layer above the device layer;
depositing a metal layer above the passivation layer;
patterning the metal layer to form a metal portion proximate to a portion of the one or more atomic-smooth, continuous channels,
wherein the metal portion is configured as one more of an upper electrode, a local heater element, and a Seebeck element.

8. The method of claim 1 , wherein the sequential path of the spaced trenches forms one or more of a repeating square wave, a repeating sine wave, a triangular wave, a sawtooth wave, and a meandering path through the device layer when viewed facing the upper surface of the device layer from above.

9. The method of claim 1 , wherein the sequential path of spaced trenches includes trenches that are arranged in one or more of (i) a single-file line, one-trench-behind-the-other-trench and (ii) two or more trenches wide when viewed facing the upper surface of the device layer from above.

10. The method of claim 1 , wherein the one or more atomic-smooth, continuous channels have cross sections that are one or more of constant, variable, and a combination of constant and variable portions when viewed along a section plane that passes perpendicular to a path of the channels through the device layer.

11. The method of claim 1 , wherein annealing the SOI wafer comprises annealing the SOI wafer:
in a reducing ambient,
at an elevated temperature greater than 1000 degrees Celsius, and
for a duration of 10 seconds to 10 minutes.

12. The method of claim 1 , wherein releasing a portion of the buried oxide layer comprises performing a hydrofluoric acid (HF) vapor etch release.

13. The method of claim 1 , wherein providing an SOI wafer comprises one of:
providing an SOI wafer having a device layer with a relatively thick layer thickness such that subsequent annealing of the SOI wafer forms at least two atomic-smooth, continuous channels within the device layer, or
providing an SOI wafer having a device layer with a relatively thin layer thickness such that subsequent annealing of the SOI wafer forms one atomic-smooth, continuous channel within the device layer.

14. A microelectromechanical system (MEMS) device, comprising:
a base layer;
a device layer supported vertically above the base layer by a portion of a buried oxide layer;
a cavity within the buried oxide layer and extending horizontally between the base layer and a released portion of the device layer; and
a passivation layer supporting the released portion of the device layer above the cavity, wherein the released portion includes at least one channel extending horizontally within the released portion beneath an upper surface of the released portion and a above lower surface of the released portion.

15. The MEMS device of claim 14 , further comprising:
a side electrode defined within the released portion of the device layer by a spacer comprising a nitride portion, the side electrode positioned proximate to a portion of the at least one channel; and
a metal portion extending through a portion of the passivation layer such that the metal portion is in electrical communication with the side electrode.

16. The MEMS device of claim 14 , further comprising:
a trench portion extending between the passivation layer and the cavity, the trench portion encompassing the released portion of the device layer such that the trench portion and the cavity thermally decouple the released portion from an unreleased portion of the device layer.

17. The MEMS device of claim 14 , wherein:
the at least one channel includes a first channel and a second channel, and
the released portion of the device layer defines (i) a first ingress leading into the first channel and a first egress leading out of first channel and (ii) a second ingress leading into the second channel and a second egress leading out of the second channel.

Assignees

• Bosch Gmbh Robert
• Feyh Ando
• Obrien Gary
• Kim Bongsang
• Stehle Jochen

Inventors

• Feyh Ando
• O'Brien Gary
• Kim Bongsang
• Stehle Jochen

Classifications

• G01N30/60

  Construction of the column · CPC title

• G01N30/6095 Primary

  Micromachined or nanomachined, e.g. micro- or nanosize · CPC title

• B81B1/002

  Holes characterised by their shape, in either longitudinal or sectional plane · CPC title

• B81C1/00119

  Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems · CPC title

• G01N2030/025

  Gas chromatography · CPC title