Diagnostic device, semiconductor manufacturing equipment system, semiconductor equipment manufacturing system, and diagnostic method
US-2024321608-A1 · Sep 26, 2024 · US
US10060867B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10060867-B2 |
| Application number | US-201615393994-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 29, 2016 |
| Priority date | Feb 27, 2007 |
| Publication date | Aug 28, 2018 |
| Grant date | Aug 28, 2018 |
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Official abstract text for this publication.
A sensor apparatus and sensor apparatus system for use in conjunction with a cassette, including a disposable or replaceable cassette. In some embodiments, the cassette includes a thermal well for permitting the sensing of various properties of a subject media. The thermal well includes a hollow housing of a thermally conductive material. In other embodiments, the cassette includes sensor leads for sensing of various properties of a subject media. The thermal well has an inner surface shaped so as to form a mating relationship with a sensing probe. The mating thermally couples the inner surface with a sensing probe. In some embodiments, the thermal well is located on a disposable portion and the sensing probe on a reusable portion.
Opening claim text (preview).
We claim: 1. A pump cassette comprising a midplate interposed between a first plate and a second plate; the first plate comprising a first pump actuation chamber wall defining a first pump actuation chamber, said first pump actuation chamber wall including an actuation port configured for connection to a source of fluidic or pneumatic pressure, and the first plate comprising a sensor housing penetrating from an outer surface of the first plate to an inner surface of the first plate facing a first side of the midplate; the second plate comprising a first pump fluid chamber wall opposite the first pump actuation chamber wall and defining a first pump fluid chamber, the second plate defining a plurality of fluid channels, each said fluid channel formed from a sealing engagement of a first fluid channel portion on an inner wall of the second plate with a mating second fluid channel portion on an opposing second side of the midplate; the midplate including an aperture between the first pump actuation chamber and the first pump fluid chamber, the aperture having a perimeter configured to hold a first pump diaphragm separating the first pump actuation chamber from the first pump fluid chamber; wherein the midplate also includes a sensor housing aperture that communicates with a sensor fluid channel of the plurality of fluid channels on the second side of the midplate, the sensor housing aperture having a perimeter configured to sealingly hold the sensor housing so that an outer surface of the sensor housing is exposed to the sensor fluid channel and an opposing inner surface of the sensor housing is configured to make contact with a sensor. 2. The pump cassette of claim 1 , wherein the inner surface of the sensor housing is exposed to the outer surface of the first plate, so that the sensor can be installed in or removed from the sensor housing from outside the pump cassette. 3. The pump cassette of claim 1 , wherein the first plate comprises a first wall of a mixing chamber, the second plate comprises a second wall of the mixing chamber, and the midplate includes an aperture between the first and second walls of the mixing chamber; and wherein the second wall of the mixing chamber includes one or more ports, each said one or more ports communicating with a mixing chamber channel of said one or more fluid channels. 4. The pump cassette of claim 1 , wherein the first side of the midplate comprises a valve fluid chamber wall defining a valve fluid chamber, the valve fluid chamber wall including valve ports connected to one or more fluid channels of the plurality of fluid channels on the second side of the midplate; and wherein the first plate comprises a valve actuation chamber wall defining a valve actuation chamber, the valve actuation chamber wall including a valve actuation port configured for connection to the source of fluidic or pneumatic pressure, and the valve actuation chamber separated from the valve fluid chamber by a valve diaphragm. 5. The pump cassette of claim 1 , wherein the first side of the midplate comprises a second pump chamber wall defining a second pump fluid chamber, the second pump chamber wall including one or more pump ports connected to one or more second pump fluid channels of the plurality of fluid channels on the second side of the midplate; and wherein the first plate comprises a second pump actuation chamber wall defining a second pump actuation chamber, the second pump actuation chamber wall including a second pump actuation port configured for connection to the source of fluidic or pneumatic pressure, and the second pump actuation chamber separated from the second pump fluid chamber by a second pump diaphragm. 6. The pump cassette of claim 1 , wherein each of one or more of the plurality of fluid channels terminates in an inlet or outlet fluid port that penetrates through the midplate and the first plate to form a fluid connection point on the outer surface of the first plate. 7. A pump cassette comprising a midplate interposed between a first plate and a second plate; the first plate comprising a first pump actuation chamber wall defining a first pump actuation chamber and a valve actuation chamber wall defining a valve actuation chamber, said first pump actuation chamber wall and valve actuation chamber wall including an actuation port configured for connection to a source of fluidic or pneumatic pressure, and the first plate comprising a sensor housing penetrating from an outer surface of the first plate to an inner surface of the first plate facing a first side of the midplate; the second plate comprising a first pump fluid chamber wall opposite the first pump actuation chamber wall and defining a first pump fluid chamber, the second plate defining a plurality of fluid channels, each said fluid channel formed from a sealing engagement of a first fluid channel portion on an inner wall of the second plate with a mating second fluid channel portion on an opposing second side of the midplate; the midplate comprising a valve fluid chamber wall defining a valve fluid chamber and including valve ports connected to one or more fluid channels of the plurality of fluid channels on the second side of the midplate, the midplate including an aperture between the first pump actuation chamber and the first pump fluid chamber, the aperture having a perimeter configured to hold a first pump diaphragm separating the first pump actuation chamber from the first pump fluid chamber, and the valve actuation chamber separated from the valve fluid chamber by a valve diaphragm; wherein the midplate also includes a sensor housing aperture that communicates with a sensor fluid channel of the plurality of fluid channels on the second side of the midplate, the sensor housing aperture having a perimeter configured to sealingly hold the sensor housing so that an outer surface of the sensor housing is exposed to the sensor fluid channel and an opposing inner surface of the sensor housing is configured to make contact with a sensor. 8. The pump cassette of claim 7 , wherein the inner surface of the sensor housing is exposed to the outer surface of the first plate, so that the sensor can be installed in or removed from the sensor housing from outside the pump cassette. 9. The pump cassette of claim 7 , wherein the first plate comprises a first wall of a mixing chamber, the second plate comprises a second wall of the mixing chamber, and the midplate includes an aperture between the first and second walls of the mixing chamber; and wherein the second wall of the mixing chamber includes one or more ports, each said one or more ports communicating with a mixing chamber channel of said one or more fluid channels. 10. The pump cassette of claim 7 , wherein the first side of the midplate comprises a second pump chamber wall defining a second pump fluid chamber, the second pump chamber wall including one or more pump ports connected to one or more second pump fluid channels of the plurality of fluid channels on the second side of the midplate; and wherein the first plate comprises a second pump actuation chamber wall defining a second pump actuation chamber, the second pump actuation chamber wall including a second pump actuation port configured for connection to the source of fluidic or pneumatic pressure, and the second pump actuation chamber separated from the second pump fluid chamber by a second pump diaphragm. 11. The pump cassette of claim 7 , wherein each of one or more of the plurality of fluid channels terminates in an inlet or outlet fluid port that penetrates through the midplate and the first plate to form a fluid connection point on the outer surface of the first plate. 12. A pump cassette
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