Cleaning liquid composition
US-11905490-B2 · Feb 20, 2024 · US
Washing hydrogen water producing method and producing apparatus
US10059911B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10059911-B2 |
| Application number | US-201615209956-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 14, 2016 |
| Priority date | Jul 17, 2015 |
| Publication date | Aug 28, 2018 |
| Grant date | Aug 28, 2018 |
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- Title
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Abstract
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A method of producing washing hydrogen water in an embodiment, includes: a step of storing ammonia water in a first tank; a step of transferring the ammonia water from the first tank to a second tank; a step of diluting the transferred ammonia water with ultrapure water in the second tank; a step of mixing the diluted ammonia water into hydrogen water; and a washing step of washing an inside of the first tank by ultrapure water to remove fine particles derived from ammonia generated in the first tank.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of producing washing hydrogen water, the method comprising: introducing ammonia water into a first tank to measure an amount of the ammonia water; transferring the ammonia water from the first tank to a second tank; diluting the transferred ammonia water with ultrapure water in the second tank; mixing the diluted ammonia water into hydrogen water; and washing an inside of the first tank with additional ultrapure water to remove fine particles derived from ammonia generated in the first tank. 2. The method of claim 1 , further comprising: measuring the ammonia water in the first tank. 3. The method of claim 1 , wherein the first tank is filled with the additional ultrapure water during the washing causing the first tank to overflow. 4. The method of claim 1 , wherein the washing removes fine particles generated in the introducing and the transferring. 5. The method of claim 1 , wherein the ultrapure water and the additional ultrapure water have a resistivity of at least 18 MΩ·cm. 6. The method of claim 1 , wherein the hydrogen water has a dissolved hydrogen concentration at 25° C. under 1 atm of at least 0.1 ppm.
Assignees
Inventors
Classifications
Cleaning during device manufacture · CPC title
Operations & Transport · mapped topic
Operations & Transport · mapped topic
- C11D11/0047Primary
Chemistry & Metallurgy · mapped topic
- C11D7/06Primary
Hydroxides · CPC title
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- What does patent US10059911B2 cover?
- A method of producing washing hydrogen water in an embodiment, includes: a step of storing ammonia water in a first tank; a step of transferring the ammonia water from the first tank to a second tank; a step of diluting the transferred ammonia water with ultrapure water in the second tank; a step of mixing the diluted ammonia water into hydrogen water; and a washing step of washing an inside of…
- Who is the assignee on this patent?
- Nomura Micro Science Kk, Acm Research Shanghai Inc
- What technology area does this patent fall under?
- Primary CPC classification C11D11/0047. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Aug 28 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).