Pressure sensor and pressure sensing method
US-9752941-B2 · Sep 5, 2017 · US
Electric device for detecting pressure
US10054507B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10054507-B2 |
| Application number | US-201615091876-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 6, 2016 |
| Priority date | Apr 6, 2016 |
| Publication date | Aug 21, 2018 |
| Grant date | Aug 21, 2018 |
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- Title
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Abstract
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An electric device for detecting pressure and a pressure sensor includes an electric current channel arranged to conduct an electric current, wherein the electric current channel is disposed adjacent or proximate to a pressure sensitive structure. Upon the pressure sensitive structure being subjected to a change of an external pressure, the pressure sensitive structure is arranged to manipulate a first electrical characteristic of the electric current channel.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method of fabricating an electric device for detecting pressure, comprising the steps of: providing a first layer of material arranged to define an electric current channel on a first side of a substrate; and providing a pressure sensitive structure on a second side opposite to the first side of the substrate by forming a spacer structure on the second side of the substrate and attaching a third layer of material on the spacer structure so as to encapsulate a second layer of material between the third layer of material and the substrate. 2. The method of fabricating an electric device in accordance with claim 1 ; wherein the step of providing the first layer of material on the first side of the substrate includes the steps of: depositing an insulating layer on the first side of the substrate; and depositing the first layer of material on the insulating layer. 3. The method of fabricating an electric device in accordance with claim 1 , further comprising the step of depositing at least two electrodes on the first layer of material.
Assignees
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Classifications
- G01L9/0072Primary
using variations in capacitance · CPC title
using semiconductor body comprising at least one PN junction as detecting element · CPC title
- G01L9/06Primary
of piezo-resistive devices · CPC title
using variations in ohmic resistance · CPC title
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- What does patent US10054507B2 cover?
- An electric device for detecting pressure and a pressure sensor includes an electric current channel arranged to conduct an electric current, wherein the electric current channel is disposed adjacent or proximate to a pressure sensitive structure. Upon the pressure sensitive structure being subjected to a change of an external pressure, the pressure sensitive structure is arranged to manipulate…
- Who is the assignee on this patent?
- Univ City Hong Kong
- What technology area does this patent fall under?
- Primary CPC classification G01L9/0072. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 21 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).