Charged particle beam lens apparatus, charged particle beam column, and charged particle beam exposure apparatus

Patent metadata

Field	Value
Publication number	US-10049854-B2
Application number	US-201615335448-A
Country	US
Kind code	B2
Filing date	Oct 27, 2016
Priority date	Jan 26, 2016
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

In this way, the charged particle beam lens apparatus can achieve a small size and high resolution.

First claim

What is claimed is:

1. A charged particle beam lens apparatus comprising:
a lens unit positioned around a through hole through which a charged particle beam travels, the lens unit being configured to converge or diffuse the charged particle beam; and
a supporting unit surrounding the lens unit, wherein
at least one of an outer peripheral portion of a magnetic member of the lens unit that is in contact with the supporting unit and an inner peripheral portion of the supporting unit that is in contact with the magnetic member of the lens unit includes a groove through which a coolant fluid flows in direct contact with the magnetic member along an outer periphery of the lens unit.

2. The charged particle beam lens apparatus as set forth in claim 1 , wherein
the outer peripheral portion and the inner peripheral portion are at least part of a plane parallel to an extending direction of the through hole.

3. The charged particle beam lens apparatus as set forth in claim 1 , wherein
the groove is symmetrically formed with respect to a plane that passes through an axis on which the through hole centers.

4. The charged particle beam lens apparatus as set forth in claim 1 , further comprising:
an inlet connected to one end of the groove; and
an outlet connected to another end of the groove, wherein
the groove receives the coolant fluid through the inlet and discharges the coolant fluid through the outlet.

5. The charged particle beam lens apparatus as set forth in claim 4 , wherein
the inlet is positioned on a charged particle beam exit side of the lens unit, and
the outlet is positioned on a charged particle beam entrance side of the lens unit.

6. The charged particle beam lens apparatus as set forth in claim 4 , further comprising:
an inlet-side fluid tank connected to the inlet to feed the coolant fluid through the inlet; and
an outlet-side fluid tank connected to the outlet to receive through the outlet the discharged coolant fluid that has traveled through the groove.

7. The charged particle beam lens apparatus as set forth in claim 4 , comprising:
a plurality of the grooves;
a plurality of the inlets respectively corresponding to the plurality of grooves; and
a plurality of the outlets respectively corresponding to the plurality of grooves.

8. The charged particle beam lens apparatus as set forth in claim 1 , wherein
the lens unit is shaped like a cylinder centering around an axis parallel to an extending direction of the through hole and has an outer diameter of no less than 22 mm and no more than 30 mm.

9. The charged particle beam lens apparatus as set forth in claim 1 , wherein
as the coolant fluid, cooling water principally including water flows through the groove.

10. The charged particle beam lens apparatus as set forth in claim 9 , wherein
the groove has a cross-sectional area of no less than 0.5 mm 2 and no more than 1 mm 2 and has a length of no less than 0.7 m and no more than 1.5 m.

11. A charged particle beam column comprising:
a particle source configured to emit a charged particle beam; and
the charged particle beam lens apparatus as set forth in claim 1 .

12. A charged particle beam exposure apparatus comprising at least one of the charged particle beam columns as set forth in claim 11 .

13. The charged particle beam lens apparatus as set forth in claim 1 , wherein
the groove is a spiral groove spiraling around the magnetic member.

14. The charged particle beam lens apparatus as set forth in claim 1 , wherein
the lens unit is one of a plurality of lens units forming an objective lens closest to a sample.

15. A charged particle beam lens apparatus comprising:
a lens unit positioned around a through hole through which a charged particle beam travels, the lens unit being configured to converge or diffuse the charged particle beam; and
a supporting unit surrounding the lens unit, wherein
the lens unit includes:
a first member positioned around the through hole; and
a magnetic member surrounding the first member, and
at least one of an outer peripheral portion of the magnetic member that is in contact with the supporting unit and an inner peripheral portion of the supporting unit that is in contact with the magnetic member includes a groove through which a coolant fluid flows in direct contact with the magnetic member along an outer periphery of the magnetic member.

16. The charged particle beam lens apparatus as set forth in claim 15 , wherein
the lens unit includes a barrier defining the through hole,
the first member is an excitation unit configured to generate magnetic field in an extending direction of the through hole, and
the magnetic member is configured to regulate a direction of a magnetic field generated by the excitation unit.

Assignees

• Intel Corp

Inventors

• Abe Tomohiko
• Kojima Shinichi

Classifications

• H01J37/141 Primary

  Electromagnetic lenses · CPC title

• H01J37/14 Primary

  magnetic · CPC title

• H01J37/07

  Eliminating deleterious effects due to thermal effects or electric or magnetic fields (H01J37/073 - H01J37/077 take precedence) · CPC title

• G03F1/20

  Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof · CPC title

• G03F7/70833

  Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground · CPC title