X-ray analyzer

Patent metadata

Field	Value
Publication number	US-10048216-B2
Application number	US-201615016362-A
Country	US
Kind code	B2
Filing date	Feb 5, 2016
Priority date	Feb 5, 2015
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

An X-ray analyzer includes: an excitation source for exciting a sample to radiate a characteristic X-ray; an X-ray detector that detects the characteristic X-ray; a collimator; at least one window that is provided between the sample and the X-ray detector and allows the characteristic X-ray to pass through; and a cooling unit that cools the window, wherein the window is laminated with one or more layer of an aluminum film and one or more layer of an insulating film, wherein a total thickness of the aluminum film of the at least one window is equal to or greater than 150 nm and is less than 300 nm, and wherein a size of the collimator is set such that a quantity of radiant heat to the X-ray detector of the atmospheric temperature when the window is not present is equal to or less than 10 μW.

First claim

What is claimed is:

1. An X-ray analyzer comprising:
an excitation source for exciting a sample to be analyzed to radiate a characteristic X-ray;
an X-ray detector that detects the characteristic X-ray;
a collimator that regulates a range of the characteristic X-ray incident to the X-ray detector;
at least one window that is provided between the sample and the X-ray detector and allows the characteristic X-ray to pass through; and
a cooling unit that cools the window to a temperature that is lower than an atmospheric temperature,
wherein the window is laminated with one or more layers of an aluminum film and one or more layers of an insulating film,
wherein a total thickness of the aluminum film of the at least one window is equal to or greater than 150 nm and is less than 300 nm, and
wherein a size of an aperture of the collimator is 300 μm or less.

2. The X-ray analyzer according to claim 1 ,
wherein the at least one window includes a first window and a second window, and
wherein the cooling unit includes a first cooling unit that cools the first window to a temperature that is equal to or greater than 20K and is equal to or less than 50K and a second cooling unit that cools the second window to a temperature that is equal to or greater than 1K and is equal to or less than 5K.

3. The X-ray analyzer according to claim 2 ,
wherein a thickness of the aluminum film of the first window is equal to or greater than 100 nm.

4. The X-ray analyzer according to claim 2 ,
wherein the at least one window further includes a third window, and
wherein the cooling unit further includes a third cooling unit that cools the third window to a temperature that is equal to or less than 0.3K.

5. The X-ray analyzer according to claim 1 ,
wherein the thickness of the insulating film is equal to or less than 100 nm.

6. The X-ray analyzer according to claim 1 ,
wherein the insulating film is formed of an organic film including at least one of polymide and paraxylene-based polymer.

7. The X-ray analyzer according to claim 1 ,
wherein the insulating film is formed of a silicon material including silicon nitride or silicon.

8. The X-ray analyzer according to claim 1 further comprising:
a through-hole formed portion, in which a plurality of through-holes are formed, is provided between the sample and the X-ray detector,
wherein a size of each of the plurality of through-holes 5 μm or less.

9. The X-ray analyzer according to claim 1 further comprising:
a housing that accommodates the at least one window and the X-ray detector; and
a pressure-resistant X-ray window that is mounted in a through-hole formed on the housing at a position between the sample and the X-ray detector.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Tanaka Keiichi
• Chinone Kazuo

Classifications

• G01N2223/3103

  cooling, cryostats · CPC title

• G01N23/2252 Primary

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• H01L39/16

  Electricity · mapped topic

• H01L39/10

  Electricity · mapped topic

• H10N60/84

  Switching means for devices switchable between superconducting and normal states · CPC title