Glass cutting systems and methods using non-diffracting laser beams

Patent metadata

Field	Value
Publication number	US-10047001-B2
Application number	US-201514943765-A
Country	US
Kind code	B2
Filing date	Nov 17, 2015
Priority date	Dec 4, 2014
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

Embodiments are directed to systems for laser cutting at least one glass article comprising a pulsed laser assembly and a glass support assembly configured to support the glass article during laser cutting within the pulsed laser assembly, wherein the pulsed laser assembly comprises at least one non-diffracting beam (NDB) forming optical element configured to convert an input beam into a quasi-NDB beam; and at least one beam transforming element configured to convert the quasi-NDB beam into multiple quasi-NDB sub-beams spaced apart a distance of about 1 μm to about 500 μm; wherein the pulsed laser assembly is oriented to deliver one or more pulses of multiple quasi-NDB sub-beams onto a surface of the glass article, wherein each pulse of multiple quasi-NDB sub-beams is operable to cut a plurality of perforations in the glass article.

First claim

What is claimed is:

1. A system for laser cutting at least one glass article comprising a pulsed laser assembly and a glass support assembly configured to support the glass article during laser cutting within the pulsed laser assembly, wherein the pulsed laser assembly comprises
at least one non-diffracting beam forming optical element configured to convert an input beam into a quasi-non-diffracting beam; and
at least one beam transforming element configured to convert the quasi-non-diffracting beam into multiple quasi-non-diffracting sub-beams spaced apart a distance of about 1 μm to about 500 μm;
wherein the pulsed laser assembly is oriented to deliver one or more pulses of the multiple quasi-non-diffracting sub-beams onto a surface of the glass article, wherein each of the one or more pulses of multiple quasi-non-diffracting sub-beams is operable to cut a plurality of perforations in the glass article.

2. The system of claim 1 further comprising at least one collimating lens configured to narrow the quasi-non-diffracting beam from the at least one non-diffracting beam forming optical element.

3. The system of claim 2 wherein the beam transforming element is oriented downstream of the collimating lens.

4. The system of claim 3 wherein the beam transforming element is oriented proximate a Fourier-transform plane produced by the collimating lens.

5. The system of claim 1 further comprising at least one additional collimating lens downstream of the beam transforming element and configured to focus the multiple quasi-non-diffracting sub-beams.

6. The system of claim 5 wherein the beam transforming element is oriented within a focal length of the additional collimating lens.

7. The system of claim 1 wherein the input beam is a Gaussian beam.

8. The system of claim 1 wherein the multiple quasi-non-diffracting sub-beams are parallel to one another and spaced apart a distance of about 1 μm to about 20 μm.

9. The system of claim 1 wherein the beam transforming element is chosen from a phase grating, an amplitude grating, or combinations thereof, and the non-diffracting beam forming optical element is chosen from an axicon, a spatial light modulator, an elliptical lens, or combinations thereof.

10. The system of claim 1 wherein the beam transforming element is configured to shift a phase of at least one of the multiple quasi-non-diffracting sub-beams from about π/4 to about 2π.

11. The system of claim 1 wherein the quasi-non-diffracting beam is a Bessel beam, an Airy beam, a Weber beam, or a Mathieu beam.

12. A system for laser cutting at least one glass article comprising a pulsed laser assembly and a glass support assembly configured to support the glass article during laser cutting within the pulsed laser assembly, wherein the pulsed laser assembly comprises
at least one axicon configured to convert a Gaussian beam into a Bessel beam;
first and second collimating lenses disposed downstream of the axicon; and
at least one beam transforming element oriented between the first and second collimating lenses, wherein the at least one beam transforming element is configured to convert the Bessel beam into multiple sub-Bessel beams which are parallel and spaced apart a distance of about 1 μm to about 500 μm;
wherein the pulsed laser assembly is oriented to deliver one or more pulses of multiple sub-Bessel beams onto a surface of the glass article, wherein each of the one or more pulses of multiple sub-Bessel beams is operable to cut a plurality of perforations in the glass article.

13. The system of claim 12 wherein the beam transforming element is a phase grating, an amplitude grating, or combinations thereof.

14. The system of claim 12 wherein the multiple sub-Bessel beams are spaced apart a distance about 1 μm to about 20 μm.

15. The system of claim 12 wherein the beam transforming element is oriented proximate a Fourier-transform plane produced by the first collimating lens.

16. The system of claim 12 wherein the beam transforming element is oriented within a focal length of the second collimating lens.

Assignees

• Corning Inc

Inventors

• West James Andrew

Classifications

• Y02P40/57

  Improving the yield, e-g- reduction of reject rates · CPC title

• C03B33/102 Primary

  involving a focussed radiation beam, e.g. lasers · CPC title

• B23K2203/54

  Operations & Transport · mapped topic

• B23K26/064

  by means of optical elements, e.g. lenses, mirrors or prisms · CPC title

• B23K2203/50

  Operations & Transport · mapped topic