Stretchable electronics for artificial skin

Patent metadata

Field	Value
Publication number	US-10045843-B2
Application number	US-201615055492-A
Country	US
Kind code	B2
Filing date	Feb 26, 2016
Priority date	Feb 27, 2015
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

A stretchable electronic device for artificial skin and a method of manufacturing the same are disclosed. The stretchable electronic device for artificial skin includes a first encapsulation layer, a heater disposed on the first encapsulation layer, a second encapsulation layer disposed on the heater, a first sensor array layer disposed on the second encapsulation layer, and a third encapsulation layer disposed on the first sensor array layer.

First claim

What is claimed is:

1. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer;
wherein the first sensor array layer comprises a first passivation layer, a semiconductor pattern disposed on the first passivation layer, a first metal pattern disposed on the semiconductor pattern, and a second passivation layer disposed on the first metal pattern; and
wherein the first sensor array layer comprises a pressure sensor, and the pressure sensor has a cavity in the first passivation layer to expose the semiconductor pattern.

2. The stretchable electronic device of claim 1 , wherein the first sensor array layer comprises at least one selected from a group consisting of a strain sensor, and a temperature sensor.

3. The stretchable electronic device of claim 1 , wherein the semiconductor pattern and the first metal pattern have a serpentine shape.

4. The stretchable electronic device of claim 1 , wherein the semiconductor pattern is a silicon pattern formed by patterning a doped silicon nanomembrane.

5. The stretchable electronic device of claim 1 , wherein the semiconductor pattern is a silicon nanoribbon.

6. The stretchable electronic device of claim 2 , wherein the strain sensor has a Wheatstone bridge configuration.

7. The stretchable electronic device of claim 1 , wherein each of the first encapsulation layer, the second encapsulation layer, and the third encapsulation layer is formed of a silicone polymer or silicone rubber.

8. The stretchable electronic device of claim 7 , wherein the silicone polymer is polydimethylsiloxane (PDMS).

9. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer,
wherein the first sensor array layer comprises a strain sensor and a pressure sensor; and
wherein the strain sensor and the pressure sensor have different curvatures depending on a position of a human body to which the stretchable electronic device is attached, and a strain induced by the human body is further relieved with an increase in the curvature.

10. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer,
wherein the first sensor array layer comprises a temperature sensor, and wherein a divergence between I-V curves of the temperature sensor under different strains is decreased with an increase in a curvature of the temperature sensor.

11. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer; and
a third encapsulation layer disposed on the first sensor array layer,
wherein the heater comprises:
a third passivation layer,
a second metal pattern disposed on the third passivation layer, and
a fourth passivation layer disposed on the second metal pattern.

12. The stretchable electronic device of claim 11 , wherein the second metal pattern has a serpentine shape.

13. A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer;
a heater disposed on the first encapsulation layer;
a second encapsulation layer disposed on the heater;
a first sensor array layer disposed on the second encapsulation layer;
a third encapsulation layer disposed on the first sensor array layer; and
a second sensor array layer disposed on the third encapsulation layer,
wherein the second sensor array layer comprises a humidity sensor and the humidity sensor detects a change in capacitance induced by a change in permittivity of a sixth passivation layer, into which a water molecule is absorbed.

14. The stretchable electronic device of claim 13 , wherein the humidity sensor comprises:
a fifth passivation layer,
a third metal pattern disposed on the fifth passivation layer, and
a sixth passivation layer disposed on the third metal pattern.

15. The stretchable electronic device of claim 14 , wherein the third metal pattern has a serpentine shape.

Assignees

• Seoul Nat Univ R&Db Foundation
• Inst Basic Science
• Samsung Electronics Co Ltd

Inventors

• Kim Daehyeong
• Hyeon Taeghwan
• Kim Jaemin
• Lee Mincheol
• Shim Hyungjoon

Classifications

• A61F2/583

  Hands; Wrist joints · CPC title

• A61F2002/5001

  Cosmetic coverings · CPC title

• A61F2002/7665

  for measuring temperatures · CPC title

• A61F2/105 Primary

  Skin implants, e.g. artificial skin · CPC title

• B25J9/00

  Program-controlled manipulators · CPC title