Gimbal assembly test system and method

Patent metadata

Field	Value
Publication number	US-10041976-B2
Application number	US-201615014479-A
Country	US
Kind code	B2
Filing date	Feb 3, 2016
Priority date	Feb 3, 2016
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

First claim

We claim:

1. A method for testing a gimbal assembly, the method comprising:
imparting a force against an exterior surface of a protective cover affixed to a wafer probe card within the gimbal assembly, wherein the imparting of the force against the exterior surface of the protective cover includes striking a recess extending into the exterior surface with a load cell tip shaped to matingly engage the recess, wherein the recess is laterally offset from a center of the protective cover;
measuring a planarity of the wafer probe card relative to the gimbal assembly during the imparting of the force; and
calculating a correlation between the force against the protective cover and the planarity of the wafer probe card.

2. The method of claim 1 , further comprising calculating a gimbaling capacity of the gimbal bearing based on the calculated correlation between the force against the protective cover and the planarity of the wafer probe card.

3. The method of claim 2 , further comprising determining whether the gimbaling capacity of the gimbal bearing satisfies a performance standard.

4. The method of claim 1 , wherein the measuring of the planarity of the wafer probe card includes calculating a first height differential between a first point on the protective cover and a reference point.

Assignees

• Globalfoundries Inc

Inventors

• Gardell David L
• Audette David M
• Neff Peter W

Classifications

• G01R35/005

  Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references (G01R33/0035, G01R35/002 take precedence) · CPC title

• G01R33/0017

  Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields · CPC title

• G01R1/0735

  arranged on a flexible frame or film · CPC title

• G01R31/44

  Testing lamps · CPC title

• G01R31/24

  Testing of discharge tubes (during manufacture H01J9/42) · CPC title