Polarization measuring device, lithography apparatus, measuring arrangement, and method for polarization measurement

Patent metadata

Field	Value
Publication number	US-10041836-B2
Application number	US-201514799503-A
Country	US
Kind code	B2
Filing date	Jul 14, 2015
Priority date	Jan 14, 2013
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

A polarization measuring device ( 10 ) for determining the polarization of a light beam ( 16, 46 ) that includes a reflector ( 12, 58 ) and a detector ( 14, 20 ). The reflector ( 12, 58 ) is configured such that the plane of incidence of the light rays in the light beam ( 16, 46 ) varies in a location-dependent manner, such that the reflector ( 12, 58 ) reflects differing polarization components of the light beam ( 16, 46 ) to different extents depending on the plane of incidence. The detector ( 14, 20 ) serves to detect the differing polarization components.

First claim

What is claimed is:

1. Polarization measuring device for determining polarization of a light beam, comprising:
a reflector arrangement configured to reflect the light beam, wherein the reflector arrangement is configured such that a plane of incidence of light rays in the light beam varies in dependence on a location of the incidence, such that the reflector arrangement reflects differing polarization components of the light beam to different extents depending on the plane of incidence of the light rays, the reflector arrangement comprising a first reflector on which the light beam is incident, to produce light reflected by the first reflector, and a second reflector, which reflects the light reflected by the first reflector; and
a detector configured to detect the differing polarization components;
wherein the second reflector is arranged to reflect the light reflected by the first reflector before the light impinges on the detector, and
wherein no transmissive elements are provided between a light source that generates the light beam and the detector.

2. Polarization measuring device according to claim 1 ,
wherein the first reflector has a curved reflecting surface.

3. Polarization measuring device according to claim 1 ,
wherein the first reflector is conical.

4. Polarization measuring device according to claim 3 , further comprising:
a mechanism configured to guide the light beam to circulate around the vertex of the conical reflector, and
an evaluation unit configured to integrate the light intensity detected by the detector.

5. Polarization measuring method for determining the polarization of a light beam with a polarization measuring device as claimed in claim 3 , comprising:
guiding the light beam around the vertex of the first reflector.

6. Polarization measuring method according to claim 5 , further comprising:
guiding the light beam to circulate around the vertex of the first reflector, and
integrating light intensity of the different polarization components detected by the detector.

7. Polarization measuring method according to claim 6 ,
wherein the radius of the circulation through which the light beam is guided corresponds to at least half of a maximum diameter of the light beam.

8. Polarization measuring method according to claim 5 , further comprising:
carrying out a plurality of polarization measurements for different positions of incidence of the light beam on the first reflector, and
averaging results of the plurality of the polarization measurements.

9. Method for polarization measurement according to claim 8 ,
wherein the positions of incidence of the light beam on the first reflector correspond to vertices of a regular polygon.

10. Method for polarization measurement according to claim 5 ,
wherein the polarization measuring device is provided in a lithography apparatus comprising:
a field facet mirror arrangement having a plurality of field facet mirrors; and
a pupil facet mirror arrangement having a plurality of pupil facet mirrors, wherein at least one of the pupil facet mirrors is assigned respectively to each of the field facet mirrors; and
wherein the polarization measuring device is provided on the pupil facet mirror arrangement,
said method further comprising guiding the light beam around the vertex of the reflector by actuating one of the field facet mirrors.

11. Polarization measuring device according to claim 1 ,
wherein the first reflector is semi-spherical.

12. Polarization measuring device according to claim 1 ,
wherein the first reflector is pyramidal.

13. Polarization measuring device according to claim 1 ,
wherein the first reflector is stationary during operation of the polarization measuring device.

14. Polarization measuring device according to claim 1 ,
wherein the detector is ring-shaped and arranged around the first reflector.

15. Polarization measuring device according to claim 1 ,
wherein the reflector arrangement is arranged such that during operation of the polarization measuring device the light beam impinges on the first reflector substantially at the Brewster angle.

16. Polarization measuring device according to claim 1 ,
wherein the second reflector is ring-shaped and is arranged around the first reflector.

17. Polarization measuring device according to claim 1 ,
wherein the detector is a planar detector that is arranged in a plane which intersects the light rays reflected by the second reflector.

18. Polarization measuring device according to claim 1 , further comprising:
an arrangement configured to carry out a plurality of individual polarization measurements for different positions of incidence of the light beam on the first reflector, and
an evaluation unit configured to average results of the plurality of individual polarization measurements.

19. Polarization measuring device according to claim 1 ,
configured to determine the polarization of extreme ultraviolet (EUV) radiation.

20. Polarization measuring device according to claim 1 ,
configured to determine a degree of polarization and/or a direction of polarization of the light beam.

21. Polarization measuring device according to claim 1 ,
wherein the first reflector is configured such that the plane of incidence of the light rays in the light beam varies over time.

22. Polarization measuring device according to claim 21 ,
wherein the first reflector is configured to rotate about the optical axis of the light beam.

23. Lithography apparatus comprising a polarization measuring device configured to determine the polarization of a light beam, the polarization measuring device comprising:
a reflector configured to reflect the light beam, wherein the reflector is configured such that the plane of incidence of the light rays in the light beam varies in at least one of a location-dependent or a time-dependent manner, such that the reflector reflects differing polarization components of the light beam to different extents dependent on the plane of incidence;
a detector for detecting the differing polarization components,
a field facet mirror arrangement having a plurality of field facet mirrors; and
a pupil facet mirror arrangement having a plurality of pupil facet mirrors, wherein at least one of the pupil facet mirrors is assigned respectively to each of the field facet mirrors;
wherein the polarization measuring device is provided on the pupil facet mirror arrangement.

24. Lithography apparatus according to claim 23 , wherein the field facet mirrors are configured to tilt such that the position of the light beam on the polarization measuring device is adjusted by tilting the field facet mirrors.

25. Lithography apparatus according to claim 23 , further comprising a plurality of further polarization measuring devices provided on the pupil facet mirror arrangement, wherein each of the further polarization measuring devices comprises:
a reflector configured to reflect the light beam, wherein the reflector is configured such that a plane of incidence of light rays in the light beam varies in dependence on a location of the incidence, such that the reflector reflects differing polarization components of the light beam to different extents depending on the plane of incidence of the light rays; and
a detector configured to detect the differing polarization components.

26. Measuring arrangement for measuring imaging propertie

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Saenger Ingo

Classifications

• G01J4/04 Primary

  Polarimeters using electric detection means (G01J4/02 takes precedence) · CPC title

• G03F7/70566

  Polarisation control · CPC title

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title