Silicon wafer edge protection device with collision protection function

Patent metadata

Field	Value
Publication number	US-10041548-B2
Application number	US-201415108083-A
Country	US
Kind code	B2
Filing date	Dec 26, 2014
Priority date	Dec 27, 2013
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

A wafer edge protection apparatus, including an electrical control module having a servomotor, a vertical motion mechanism and a protection mechanism. The protection mechanism includes: a shaft coupler, in fixed connection with a shaft of the servomotor and having a plurality of first connecting components; and a transmission sleeve, in fixed connection with the vertical motion mechanism and having a plurality of second connecting components in movable connection with the plurality of first connecting components. The plurality of first connecting components is in movable connection with the plurality of second connecting components such that, in the event of a torque output by the shaft of the servomotor not exceeding a limit, the plurality of first connecting components is engaged with the plurality of second connecting components, and in the event of the torque output by the shaft of the servomotor exceeding the limit, the plurality of first connecting components is disengaged from the plurality of second connecting components, thereby preventing a rotational motion generated by the servomotor from transferring to the vertical motion mechanism.

First claim

What is claimed is:

1. A wafer edge protection apparatus, comprising an electrical control module and a vertical motion mechanism, the electrical control module comprising a servomotor for generating a rotational motion, wherein the wafer edge protection apparatus further comprises a protection mechanism comprising:
a shaft coupler, in fixed connection with a shaft of the servomotor and having a plurality of first connecting components; and
a transmission sleeve, in fixed connection with the vertical motion mechanism and having a plurality of second connecting components in movable connection with the plurality of first connecting components such that
in an event of a torque output by the shaft of the servomotor not exceeding a limit, the plurality of first connecting components are engaged with the plurality of second connecting components, thereby allowing transfer of the rotational motion generated by the servomotor to the vertical motion mechanism for driving the vertical motion mechanism to move vertically, and
in an event of the torque output by the shaft of the servomotor exceeding the limit, the plurality of first connecting components are disengaged from the plurality of second connecting components, thereby preventing the rotational motion generated by the servomotor from transferring to the vertical motion mechanism.

2. The wafer edge protection apparatus according to claim 1 , wherein:
the shaft coupler is substantially cylindrical; the transmission sleeve has an annular wall circumferentially surrounding the shaft coupler; the plurality of first connecting components are circumferentially disposed on the shaft coupler; the plurality of first connecting components have end portions radially projecting beyond a surface of the shaft coupler; the plurality of second connecting components are a plurality of recesses circumferentially distributed on an inner surface of the annular wall; and the plurality of recesses correspond to the end portions of the plurality of first connecting components in shape and position.

3. The wafer edge protection apparatus according to claim 2 , wherein each of the plurality of first connecting components comprises:
a transmission sliding pin disposed radially in the shaft coupler in a slideable manner, an end portion of the transmission sliding pin projecting beyond the surface of the shaft coupler; and
a compressible spring disposed circumferentially over the transmission sliding pin, the compressible spring being fixed to a spring retainer at one end and abutting against the end portion of the transmission sliding pin on the other end, thereby exerting, on the end portion of the transmission sliding pin, a force toward a corresponding one of the plurality of recesses on the transmission sleeve.

4. The wafer edge protection apparatus according to claim 3 , wherein the force exerted by each compressible spring on the end portion of the corresponding transmission sliding pin is determined by radial position of the spring retainer within the shaft coupler.

5. The wafer edge protection apparatus according to claim 3 , wherein the end portion of the transmission sliding pin is a conical tip having a diameter gradually decreasing along a direction from the shaft coupler to the transmission sleeve, and the end portion of the transmission sliding pin has a shape in correspondence with a shape of the corresponding one of the plurality of recesses.

6. The wafer edge protection apparatus according to claim 3 , wherein each compressible spring is configured to firmly press the end portion of the corresponding transmission sliding pin in the corresponding one of the plurality of recesses in the event of the torque output by the shaft of the servomotor not exceeding the limit, and to allow the end portion of the corresponding transmission sliding pin to rotate relative to the transmission sleeve and thereby escape from the corresponding one of the plurality of recesses in the event of the torque output by the shaft of the servomotor exceeding the limit.

7. The wafer edge protection apparatus according to claim 6 , wherein the force exerted by each compressible spring on the end portion of the corresponding transmission sliding pin is determined by radial position of the spring retainer within the shaft coupler.

8. The wafer edge protection apparatus according to claim 6 , wherein the end portion of the transmission sliding pin is a conical tip having a diameter gradually decreasing along a direction from the shaft coupler to the transmission sleeve, and the end portion of the transmission sliding pin has a shape in correspondence with a shape of the corresponding one of the plurality of recesses.

9. The wafer edge protection apparatus according to claim 1 , wherein the protection mechanism further comprises a switch device configured to control the servomotor to stop outputting the torque when the plurality of first connecting components are disengaged from the plurality of second connecting components.

10. The wafer edge protection apparatus according to claim 9 , wherein the switch device comprises a limit bolt fixed on the shaft coupler and a limit switch fixed on the transmission sleeve, such that
the limit bolt and the limit switch are not in contact with each other in case of the plurality of first connecting components being engaged with the plurality of second connecting components, and
the limit bolt and the limit switch are in contact with each other, thereby controlling the servomotor to stop outputting the torque, in case of the plurality of first connecting components being disengaged from the plurality of second connecting components.

11. The wafer edge protection apparatus according to claim 1 , wherein the vertical motion mechanism comprises a screw lever in fixed connection with the transmission sleeve.

12. The wafer edge protection apparatus according to claim 1 , wherein numbers of the first and the second connecting components are both three.

Assignees

• Shanghai Microelectronics Equi
• Shanghai Micro Electronics Equipment Group Co Ltd

Inventors

• Huang Jingli
• Zhu Yuebin

Classifications

• H10P72/7626 Primary

  characterised by the construction of the shaft · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title