Film-like member support apparatus

Patent metadata

Field	Value
Publication number	US-10040175-B2
Application number	US-201514696515-A
Country	US
Kind code	B2
Filing date	Apr 27, 2015
Priority date	May 3, 2014
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

A film-like member is supported in a flat shape by vacuum suction. A plurality of lift pins are arranged in a planar configuration and bear a film-like member placed on their upper ends. Tubular pads made of rubber for holding the film-like member by vacuum suction are attached to upper portions of the lift pins. The height of the lift pins can be adjusted by a screw fastening mechanism. The deformation of the film-like member can be corrected to a flat or concavely curved shape by suction from the pads. When the correction cannot be achieved by suction alone, the correction may be supplemented by ejection of air from a nozzle.

First claim

The invention claimed is:

1. An apparatus for a film having a first surface and a second surface, comprising:
a frame;
a plurality of first lift pins fixed to the frame and each having a first height from the frame;
a plurality of second lift pins fixed to a middle of the frame and each having a second height from the frame being smaller than the first height;
a plurality of first pads each including an elastic member, and provided at end portions of the plurality of first lift pins; and
a plurality of second pads each including an elastic member, and provided at end portions of the plurality of second lift pins,
wherein two pads of the plurality of first pads which are positioned at both ends of the frame have a smaller external diameter than the rest of the plurality of first pads, and
wherein the plurality of first pads and the plurality of second pads are configured to attach the first surface thereto by suction.

2. The apparatus according to claim 1 , wherein the plurality of first pads have different suction forces depending on a bearing position of the film.

3. The apparatus according to claim 1 , wherein each of the plurality of first pads is configured to bear the film at a point.

4. The apparatus according to claim 1 , further comprising an air nozzle configured to blow air,
wherein the plurality of first pads are configured to attach the first surface thereto by suction while the air is blown onto the second surface.

5. An apparatus for a film, comprising:
a plurality of first lift pins each comprising an elastic member at an end portion;
a plurality of second lift pins each comprising an elastic member at an end portion;
a vacuum pump connected to each of the plurality of first lift pins and the plurality of second lift pins; and
a mechanism for independently adjusting heights of the plurality of first lift pins and the plurality of second lift pins,
wherein the plurality of first lift pins and the plurality of second lift pins are configured to suction air so that the film is held with the plurality of first lift pins and the plurality of second lift pins, and
wherein the plurality of first lift pins have a smaller external diameter than the plurality of second lift pins.

6. The apparatus according to claim 5 , wherein the plurality of first lift pins and the plurality of second lift pins have different suction forces depending on a bearing position of the film.

7. The apparatus according to claim 5 , wherein each of the plurality of first lift pins is configured to bear the film at a point.

8. The apparatus according to claim 5 , further comprising an air nozzle configured to blow air,
wherein the plurality of first lift pins are configured to attach a surface of the film thereto by suction while the air is blown onto the opposite surface of the film.

9. An apparatus for a film having a first surface and a second surface, comprising:
a frame;
a first lift pin fixed to the frame;
a second lift pin fixed to the frame;
a first pad including an elastic member, and provided at an end portion of the first lift pin; and
a second pad including an elastic member, and provided at an end portion of the second lift pin,
wherein the first pad has a smaller external diameter than the second pad, and
wherein the first pad and the second pad are configured to attach the first surface thereto by suction.

10. The apparatus according to claim 9 , further comprising:
a third lift pin fixed to the frame; and
a third pad including an elastic member, and provided at an end portion of the third lift pin,
wherein the third pad has a smaller external diameter than the second pad, and
wherein the second lift pin is positioned between the first lift pin and the third lift pin.

11. The apparatus according to claim 9 , wherein the suction force of the first pad is different from the suction force of the second pad.

12. The apparatus according to claim 9 , wherein the first pad is configured to bear the film at a point.

13. The apparatus according to claim 9 , further comprising an air nozzle configured to blow air,
wherein the first pad is configured to attach the first surface thereto by suction while the air is blown onto the second surface.

Assignees

• Semiconductor Energy Lab

Inventors

• Kumakura Kayo
• Idojiri Satoru
• Ohno Masakatsu
• Takeshima Koichi
• Hirakata Yoshiharu
• Yokoyama Kohei

Classifications

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• B25B11/005 Primary

  Vacuum work holders · CPC title

• B29C53/18 Primary

  of plates or sheets · CPC title

• B29L2007/002

  Panels; Plates; Sheets · CPC title