Methods of depositing a metal alloy film

Patent metadata

Field	Value
Publication number	US-10036089-B2
Application number	US-201414316126-A
Country	US
Kind code	B2
Filing date	Jun 26, 2014
Priority date	Jun 26, 2013
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

Provided are methods of depositing films comprising exposing at least a portion of a substrate to a metal precursor to provide a first metal on the substrate and an organometallic reducing agent to deposit a second metal on the substrate to form a mixture or alloy of the first metal and the second metal. Exposure to the metal precursor and organometallic reducing agent can be in either order or simultaneously.

First claim

What is claimed is:

1. A method of depositing an alloy film, the method comprising:
positioning a substrate within a processing chamber;
exposing at least a portion of the substrate to a metal halide precursor to provide a first metal on the substrate;
purging unreacted metal halide precursor from the processing chamber; and
exposing the portion of the substrate to an organometallic reducing agent comprising a second metal different from the first metal to deposit the second metal on the substrate resulting in an alloy of the first metal and the second metal, the organometallic reducing agent comprising an alkyl of the second metal, the second metal selected from the group consisting of In, Sb, Tl, Pb, Bi and mixtures thereof, the alkyl of the second metal comprises one or more of dimethyl-metal hydride, diethylhydrido-metal, methyldihydro-metal, and an alkyl metal hydrides of the formula [(C x H y ) z-a MH a ] n , wherein x has a value of 1 to 3, y has a value of 2x+1, z has a value of 2 to 5, a has a value of 1 to 2, and n has a value of 1 to 4.

2. The method of claim 1 , wherein the metal halide comprises titanium tetrachloride.

3. The method of claim 1 , wherein exposure of the substrate to the metal halide at least partially overlaps with exposure of the substrate to the organometallic reducing agent.

4. The method of claim 1 , further comprising purging the organometallic reducing agent.

5. The method of claim 1 , wherein the substrate is sequentially exposed metal halide and the organometallic reducing agent.

6. The method of claim 5 , wherein the substrate is exposed to the metal halide before being exposed to the organometallic reducing agent.

7. The method of claim 5 , wherein the substrate is exposed to the organometallic reducing agent before being exposed to the metal halide.

8. The method of claim 1 , further comprising soaking the alloy film with an alloying agent, wherein the alloying agent comprises one or more of SiH 4 , GeH 4 , trimethylgallium, and B 2 H 6 .

9. The method of claim 1 , wherein the alloy film contains less than 20% carbon.

10. A method of depositing an alloy film, the method comprising:
positioning a substrate within a processing chamber; and
simultaneously flowing a metal halide precursor to provide a first metal and an organometallic reducing agent comprising a second metal different from the first metal into the processing chamber to deposit an alloy film comprising the first metal and the second metal, the organometallic reducing agent comprising an alkyl of the second metal, the second metal selected from the group consisting of In, Sb, Tl, Pb, Bi and mixtures thereof, the alkyl of the second metal comprises one or more of dimethyl-metal hydride, diethylhydrido-metal, methyldihydro-metal, and an alkyl metal hydrides of the formula [(C x H y ) z-a MH a ] n , wherein x has a value of 1 to 3, y has a value of 2x+1, z has a value of 2 to 5, a has a value of 1 to 2, and n has a value of 1 to 4.

11. The method of claim 10 , wherein the metal halide comprises titanium tetrachloride.

12. The method of claim 10 , wherein the alloy film contains less than 20% carbon.

13. A method of depositing an alloy film, the method comprising:
positioning a substrate within a processing chamber; and
flowing a metal halide precursor to provide a first metal into the processing chamber to contact a portion of the substrate, the first metal comprising one or more of titanium, tantalum, tungsten or aluminum; and
flowing an organometallic reducing agent comprising a second metal different from the first metal into the processing chamber to contact a portion of the substrate, the organometallic reducing agent comprising an alkyl of the second metal, the second metal selected from the group consisting of In, Sb, Tl, Pb, Bi and mixtures thereof, the alkyl of the second metal comprises one or more of dimethyl-metal hydride, diethylhydrido-metal, methyldihydro-metal, and an alkyl metal hydrides of the formula [(C x H y ) z-a MH a ] n , wherein x has a value of 1 to 3, y has a value of 2x+1, z has a value of 2 to 5, a has a value of 1 to 2, and n has a value of 1 to 4,
wherein the metal halide and organometallic reducing agent are simultaneously flowed into different regions of the processing chamber and are separated by an inert gas curtain to prevent gas phase reaction of the metal halide and organometallic reducing agent, and
wherein the alloy film is substantially pure with less than about 1% impurities on an atomic basis.

Assignees

• Applied Materials Inc

Inventors

• Thompson David
• Anthis Jeffrey W

Classifications

• C23C16/45553

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/18

  from metallo-organic compounds · CPC title

• C23C16/08 Primary

  from metal halides · CPC title