Semiconductor substrate treatment liquid, treatment method, and method for manufacturing semiconductor-substrate product using these
US-2016254139-A1 · Sep 1, 2016 · US
US10035977B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10035977-B2 |
| Application number | US-201514940702-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 13, 2015 |
| Priority date | Oct 26, 2012 |
| Publication date | Jul 31, 2018 |
| Grant date | Jul 31, 2018 |
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Caustic-free detergent compositions are provided. Detergent compositions including an aminocarboxylate, water conditioning agent, non-caustic source of alkalinity and water beneficially do not require the use of additional surfactants and/or polymers to provide suitable detergency and prevent scale build-up on treated surfaces. The detergent compositions are used with a sanitizer to employ the caustic-free detergent compositions are particularly suitable for use as low temperature ware wash detergents that beneficially reduce scale build-up. Methods of employing the caustic-free detergent compositions are also provided.
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What is claimed is: 1. A caustic-free detergent composition comprising: from about 0.1-15 wt-% of an aminocarboxylate; from about 0.1-15 wt-% of a polycarboxylate water conditioning polymer; from about 0.1-15 wt-% of an additional sequestrant, wherein the sequestrant is a phosphonate; from about 10-60 wt-% of a non-caustic alkalinity source; from about 40-80 wt-% of water, wherein the composition is caustic-free; wherein the composition has a pH between about 8 to 11.5; and wherein the ratio of the aminocarboxylate to the water conditioning polymer to the sequestrant is from about 1:1:1 to about 5:1:10. 2. The composition of claim 1 , wherein the aminocarboxylate comprises methylglycinediacetic acid (MGDA), glutamic acid-N,N-diacetic acid (GLDA), diethylenetriaminepentaacetic acid (DTPA), diethylenetriaminepentaacetic acid, N hydroxyethyl ethylenediaminetriacetic acid (HEDTA), ethylenediaminetetraacetic acid (EDTA), or combinations thereof. 3. The composition of claim 2 , wherein the aminocarboxylate is methylglycinediacetic acid or trisodium salt of methylglycinediacetic acid. 4. The composition of claim 1 , wherein the polycarboxylate water conditioning polymer is a polyacrylate, polycarboxylate or polycarboxylic acid and wherein the sequestrant is a condensed phosphate, phosphonate or organic phosphonate. 5. The composition of claim 1 , wherein the polycarboxylate water conditioning polymer is a polyacrylic acid polymer. 6. The composition of claim 1 , wherein the additional sequestrant is a phosphonic acid. 7. The composition of claim 6 , wherein the phosphonic acid comprises 1-diphosphonic acid, CH2C(OH)[PO(OH)2]2; aminotri(methylenephosphonic acid), N[CH2PO(OH)2]3; aminotri(methylenephosphonate), sodium salt (ATMP), N[CH2PO(ONa)2]3; 2-hydroxyethyliminobis(methylenephosphonic acid), HOCH2CH2N[CH2PO(OH)2]2; diethylenetriaminepenta(methylenephosphonic acid), (HO)2POCH2N[CH2N[CH2PO(OH)2]2]2; diethylenetriaminepenta(methylenephosphonate), sodium salt (DTPMP), C9H(28−x)N3NaxO15P5 (x=7); hexamethylenediamine(tetramethylenephosphonate), potassium salt, C10H(28−x)N2KxO12P4 (x=6); bis(hexamethylene)triamine(pentamethylenephosphonic acid), or combinations thereof. 8. A caustic-free detergent composition comprising from about 1-15 wt-% of an aminocarboxylate comprising methylglycinediacetic acid (MGDA), glutamic acid-N,N-diacetic acid (GLDA), diethylenetriaminepentaacetic acid (DTPA), diethylenetriaminepentaacetic acid, N hydroxyethyl ethylenediaminetriacetic acid (HEDTA), ethylenediaminetetraacetic acid (EDTA), or combinations thereof; from about 0.1-15 wt-% of a water conditioning polymer comprising a polyacrylate, a polycarboxylate, a polycarboxylic acid or combinations thereof; from about 0.1-15 wt-% of a phosphonic acid sequestrants comprising aminotri(methylenephosphonic acid) (ATMP), diethylenetriaminepenta(methylenephosphonic acid) (DTPMP) or combinations thereof; from about 20-60 wt-% of an alkalinity source; and from about 40-80 wt-% of water, wherein the composition is caustic-free, does not contain surfactants, reduces or eliminates scale build-up on treated surfaces, and has a pH between about 8 to 11.5; and wherein the ratio of the aminocarboxylate to the water conditioning polymer to the sequestrant is from 1:1:1 to about 5:1:10. 9. The composition of claim 8 , wherein the amincarboxylate is methylglycinediacetic acid is a trisodium salt. 10. The composition of claim 8 , wherein the water conditioning polymer is a polyacyrlyic acid polymer. 11. The composition of claim 8 , wherein the phosphonic acid sequestrant is DTPMP. 12. The composition of claim 8 , wherein the phosphonic acid sequestrant is ATMP. 13. The composition of claim 8 , wherein the ratio of the aminocarboxylic acid material to the water conditioning polymer to the sequestrant is in a ratio of from about 1:1:1 to about 5:1:5, wherein the ratio of the aminocarboxylate to the water conditioning polymer is from about 1:3 to about 3:1, wherein the ratio of the aminocarboxylate to the sequestrant is from about 1:5 to about 5:1, wherein the ratio of the water conditioning agent to the sequestrant is from about 1:5 to about 5:1, and wherein the ratio of the aminocarboxylate to the alkalinity source is from about 1:5 to about 1:100. 14. The composition of claim 8 , wherein the composition comprises between about 1 wt-% and about 10 wt-% methylglycinediacetic acid, between about 1 wt-% and about 10 wt-% water conditioning polymer, between about 1 wt-% and about 8 wt-% sequestrant, between about 20 wt-% and about 50 wt-% alkalinity source, and between about 40 wt-% and about 60 wt-% water. 15. A method of cleaning using a caustic-free ware wash detergent comprising: providing the caustic-free alkaline detergent composition according to claim 8 ; generating a use solution of the composition; washing a surface or article with the detergent use composition having a pH between about 8 and about 11.5; employing a sanitizer with the detergent wash solution or a sanitizer formulated in the caustic-free alkaline detergent; employing a rinse aid; wherein the temperature of the detergent use solution in the washing step is not heated above about 140° F., and wherein the detergent use solution contains sufficient use levels of the aminocarboxylate, water conditioning agent and sequestrant to prevent the formation of precipitates in hard water sources.
Hydroxides · CPC title
Water softening arrangements · CPC title
Aminoacids · CPC title
Carboxylic acids or salts thereof · CPC title
containing phosphorus · CPC title
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