Sputtering target, method of fabricating the same, and method of fabricating an organic light emitting display apparatus
US-2015031153-A1 · Jan 29, 2015 · US
Oxide sputtering target, and thin film transistor using the same
US10032927B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10032927-B2 |
| Application number | US-201615374189-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2016 |
| Priority date | Mar 6, 2014 |
| Publication date | Jul 24, 2018 |
| Grant date | Jul 24, 2018 |
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- Title
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Abstract
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An oxide sputtering target includes at least one of indium (In), zinc (Zn), tin (Sn), and gallium (Ga), and tungsten (W) in an amount from 0.005 mol % to 1 mol %.
First claim
Opening claim text (preview).
What is claimed is: 1. An oxide sputtering target comprising: at least one of indium (In), zinc (Zn), tin (Sn), and gallium (Ga); and niobium (Nb) in an amount from 0.01 mol % to 1 mol %. 2. The oxide sputtering target of claim 1 , wherein an indium content is from 10 mol % to 60 mol %, a zinc content is from 10 mol % to 65 mol %, and a tin content is from 0.1 mol % to 60 mol %. 3. The oxide sputtering target of claim 1 , wherein the oxide sputtering target comprises indium (In). 4. The oxide sputtering target of claim 1 , wherein the oxide sputtering target comprises zinc (Zn). 5. The oxide sputtering target of claim 1 , wherein the oxide sputtering target comprises tin (Sn). 6. The oxide sputtering target of claim 1 , wherein the oxide sputtering target comprises gallium (Ga).
Assignees
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Classifications
Manufacturing of targets · CPC title
Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title
- H01J37/3429Primary
Plural materials · CPC title
- H01L29/7869Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US10032927B2 cover?
- An oxide sputtering target includes at least one of indium (In), zinc (Zn), tin (Sn), and gallium (Ga), and tungsten (W) in an amount from 0.005 mol % to 1 mol %.
- Who is the assignee on this patent?
- Samsung Display Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3429. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jul 24 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).