Semiconductor device with trench-like feed-throughs

Patent metadata

Field	Value
Publication number	US-10032901-B2
Application number	US-201615091431-A
Country	US
Kind code	B2
Filing date	Apr 5, 2016
Priority date	Oct 30, 2009
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

A semiconductor device (e.g., a flip chip) includes a substrate layer that is separated from a drain contact by an intervening layer. Trench-like feed-through elements that pass through the intervening layer are used to electrically connect the drain contact and the substrate layer when the device is operated.

First claim

What is claimed is:

1. A semiconductor device comprising:
an electrically conductive substrate layer;
a drain contact, wherein said substrate layer is separated from said drain contact by an intervening layer;
a plurality of gate trenches in a gate region under a layer of source metal and that extend into but not completely through said intervening layer, said gate trenches comprising a first gate trench and a second gate trench, each of said gate trenches filled with a first filler material;
a plurality of source contact trenches in a source region under said layer of source metal and that that extend into but not completely through said intervening layer, each of said source contact trenches filled with a second filler material, said source contact trenches comprising a first source contact trench and a second source contact trench, wherein said first source contact trench is between said first gate trench and said second gate trench, and wherein said second gate trench is between said first source contact trench and said second source contact trench; and
a plurality of feed-through trenches comprising more than one feed-through trench, each of said feed-through trenches in said plurality of feed-through trenches under a layer of drain metal in contact with said drain contact, wherein said feed-through trenches extend completely through said intervening layer to said substrate layer, each of said feed-through trenches filled with said second filler material in contact with said layer of drain metal, wherein said feed-through trenches are arrayed between said layer of drain metal and said substrate layer in only a portion of a drain region of said device that is under said layer of drain metal, wherein said feed-through trenches are not included outside said portion and wherein said feed-through trenches within said portion are concentrated toward said source region.

2. The semiconductor device of claim 1 wherein said first filler material comprises polysilicon and said second filler material comprises tungsten.

3. The semiconductor device of claim 1 wherein said feed-through trenches are each lined with a conformal coating that separates said second filler material from said intervening layer.

4. The semiconductor device of claim 3 wherein said conformal coating comprises material selected form the group consisting of: titanium and titanium nitride.

5. The semiconductor device of claim 3 wherein said conformal coating comprises a thickness of titanium of 60 nanometers (600 Angstroms) and a thickness of titanium-nitride of 20 nanometers (200 Angstroms).

6. The semiconductor device of claim 1 wherein said device comprises a flip chip having a plurality of solder balls formed on a surface thereof, wherein said drain contact is coupled to at least one of said solder balls.

7. The semiconductor device of claim 1 wherein each trench in said plurality of feed-through trenches has a depth of 8.7 microns at their shallowest points, a depth of 9.3 microns at their deepest points, a width of 0.9 microns, and a distance between adjacent feed-through trenches of 1.7 microns.

8. A flip chip semiconductor device comprising:
a plurality of solder balls comprising a solder ball coupled to a drain contact on a first surface of said device;
a first metal layer on a second surface of said device, said second surface opposite said first surface;
a substrate layer adjacent said first metal layer, wherein said substrate layer is separated from said drain metal by an intervening layer;
a plurality of gate trench elements in a gate region under a layer of source metal and that extend into but not completely through said intervening layer, said gate trench elements comprising a first gate trench element and a second gate trench element, each of said gate trench elements filled with a first filler material;
a plurality of source contact trench elements in a source region under said layer of source metal and that extend into but not completely through said intervening layer, each of said source contact trench elements filed with a second filler material, said source contact trench elements comprising a first source contact trench element and a second source contact trench element, wherein said first source contact trench element is between said first gate trench element and said second gate trench element, and wherein said second gate trench element is between said first source contact trench element and said second source contact trench element, and wherein said source contact trench elements are in contact with a layer of source metal but said gate trench elements are isolated from said source metal; and
a plurality of feed-through trench elements, said plurality comprising multiple feed-through trench elements, each of said feed-through trench elements in said plurality of feed-through trench elements under a layer of drain metal that is contact with said drain contact, wherein said feed-through trench elements extend completely through said intervening layer to said substrate layer, each of said feed-through trench elements filled with said second filler material in contact with said layer of drain metal, wherein said feed-through trench elements pass through said intervening layer and into said substrate layer, wherein said feed-through trench elements in said plurality of feed-through trench elements are arrayed between said layer of drain metal and said substrate layer in only a portion of a drain region of said device that is under said layer of drain metal, wherein said feed-through trench elements are not included outside said portion and wherein said feed-through trench elements within said portion are concentrated toward said source region, wherein in operation said device comprises a circuit from a source contact through said intervening layer, said substrate layer, and said feed-through trench elements to said drain contact.

9. The semiconductor device of claim 8 wherein said first filler material comprises polysilicon and said second filler material comprises tungsten.

10. The semiconductor device of claim 8 wherein said source contact trench elements and said feed-through trench elements are each lined with a conformal coating that separates said second filler material from said intervening layer.

11. The semiconductor device of claim 10 wherein said conformal coating comprises material selected from the group consisting of: titanium and titanium-nitride.

12. A method of fabricating a flip chip, said method comprising:
forming a plurality of gate trenches in a surface of an epitaxial layer in a gate region of a structure, said gate trenches comprising a first gate trench and a second gate trench, said gate trenches extending partially into but not completely through said epitaxial layer, wherein a plurality of source contact trenches are also formed in said surface of said epitaxial layer in a source region of said structure, said source contact trenches extending partially into but not completely through said epitaxial layer, said source contact trenches comprising a first source contact trench and a second source contact trench, wherein said first source contact trench is between said first gate trench and said second gate trench, and wherein said second gate trench is between said first source contact trench and said second source contact trench;
forming a plurality of feed-through trenches in said surface, said plurality of feed-through trenches comprising more than one feed-through trench, said feed-through trenches extending completely through said epitaxial layer and into a substrate layer adjoining a second surface of said epitaxial layer; and
depositing a first filler mater

Assignees

• Vishay Siliconix

Inventors

• Pattanayak Deva
• Owyang King
• Kasem Mohammed
• Terrill Kyle
• Katraro Reuven
• Chen Kuo-In
• Choi Calvin
• Chen Qufei
• Wong Ronald
• Lui Kam Hong
• Xu Robert

Classifications

• H10W72/936

  Multiple bond pads having different shapes · CPC title

• H10W72/932

  Plan-view shape, i.e. in top view · CPC title

• H10W72/251

  Materials · CPC title

• H10W72/242

  relative to the surface, e.g. recessed, protruding · CPC title

• H10W72/232

  Plan-view shape, i.e. in top view · CPC title