Selective gas etching for self-aligned pattern transfer

Patent metadata

Field	Value
Publication number	US-10032632-B2
Application number	US-201615284862-A
Country	US
Kind code	B2
Filing date	Oct 4, 2016
Priority date	Oct 4, 2016
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

Selective gas etching for self-aligned pattern transfer uses a first block and a separate second block formed in a sacrificial layer to transfer critical dimensions to a desired final layer using a selective gas etching process. The first block is a first hardmask material that can be plasma etched using a first gas, and the second block is a second hardmask material that can be plasma etched using a second gas separate from the first gas. The first hardmask material is not plasma etched using the second gas, and the second hardmask material is not plasma etched using the first gas.

First claim

What is claimed is:

1. A method for selective gas etching for self-aligned pattern transfer, the method comprising:
forming a first block in a sacrificial layer, the first block comprising a first hardmask material that can be plasma etched using a first gas;
forming a second block separate from the first block in the sacrificial layer, the second block comprising a second hardmask material that can be plasma etched using a second gas separate from the first gas;
depositing titanium containing anti-reflective coating across the sacrificial layer and over the first block and second block; and
adjusting a titanium containing anti-reflective coating thickness to equal a first block thickness and a second block thickness
wherein the first hardmask material is not plasma etched using the second gas and the second hardmask material is not plasma etched using the first gas.

2. The method of claim 1 , wherein the first block and the second block comprise dimensions along the sacrificial layer greater than or equal to critical dimensions to be transferred to layers below the sacrificial layer.

3. The method of claim 1 , wherein the first hardmask material and the second hardmask material comprise inorganic hardmask materials.

4. The method of claim 1 , wherein:
the first hardmask material comprises titanium nitride; and
the second hardmask material comprises silicon nitride.

5. The method of claim 1 , wherein forming the first block comprises:
depositing the first hardmask material across the sacrificial layer;
forming a first photoresist stack comprising a silicon containing anti-reflective coating and an organic planarization layer on the first hardmask material, the first photoresist stack having a size and location corresponding to the first block;
using reactive ion etching with carbon tetrafluoride to remove the silicon containing anti-reflective coating;
using reactive ion etching with chlorine gas to etch the first hardmask material; and
using plasma etching to remove the organic planarization layer, leaving only the first block in the sacrificial layer.

6. The method of claim 5 , wherein forming the second block comprises:
depositing the second hardmask material across the sacrificial layer and over the first block;
adjusting a second hardmask material thickness to equal a first block thickness;
forming a second photoresist stack comprising a silicon containing anti-reflective coating and an organic planarization layer on the second hardmask material, the second photoresist stack having a size and location corresponding to the second block;
using reactive ion etching with fluoromethane to remove the silicon containing anti-reflective coating and to etch the second hardmask material; and
using plasma etching to remove the organic planarization layer, leaving only the second block and the first block in the sacrificial layer.

7. The method of claim 1 , further comprising using the sacrificial layer comprising the first block and the second block in sidewall image transfer to transfer a desired pattern into layers below the sacrificial layer.

8. The method of claim 7 , wherein using the sacrificial layer comprising the first block and the second block in sidewall image transfer further comprises:
using the first block to transfer a mandrel critical dimension to layers below the sacrificial layer; and
using the second block to transfer a non-mandrel critical dimension to the layers below the sacrificial layer.

9. The method of claim 1 , further comprising forming a plurality of amorphous silicon mandrels on the sacrificial layer such that one amorphous silicon mandrel is located above the first block and one space between adjacent amorphous silicon mandrels is located above the second block.

10. The method of claim 9 , wherein forming the plurality of amorphous silicon mandrels on the sacrificial layer comprises:
depositing an amorphous silicon layer on the sacrificial layer;
depositing an organic planarization layer on the amorphous silicon layer;
depositing a silicon containing anti-reflective coating layer on the organic planarization layer;
forming a plurality of resist mandrels on the silicon containing anti-reflective coating layer; and
etching the amorphous silicon layer to form the plurality of amorphous silicon mandrels corresponding to the plurality of resist mandrels.

11. The method of claim 9 , further comprising:
depositing an oxide spacer over the plurality of amorphous silicon mandrels and the sacrificial layer; and
using anisotropic etching to remove the oxide spacer from a top of each amorphous silicon spacer and from the space between adjacent amorphous silicon mandrels, leaving an oxide spacer on either side or each amorphous silicon mandrel.

12. The method of claim 11 , wherein:
the first block extends completely under one of the amorphous silicon mandrels and the oxide spacers on either side of one of the amorphous silicon mandrels; and
the second block extends completely under the one space between adjacent amorphous silicon mandrels and oxide spacers located on either side of the one space between adjacent amorphous silicon spacers.

13. The method of claim 12 , further comprising using the first gas and the second gas in reactive ion etching to transfer a first critical dimension defined by one of the amorphous silicon mandrels and the oxide spaces on either side of one of the amorphous silicon mandrels to the first block and to transfer a second critical dimension defined by the one space between adjacent amorphous silicon mandrels and oxide spacers located on either side of the one space between adjacent amorphous silicon mandrels to the second block.

14. The method of claim 13 , wherein using the first gas and the second gas in reactive ion etching further comprises:
using reactive ion etching with the first gas to transfer the first critical dimension to the first block, to transfer the first critical dimension into the titanium containing anti-reflective coating layer located under amorphous silicon mandrels and the oxide spaces on either side of the amorphous silicon mandrels and to remove the first block and titanium containing anti-reflective coating layer located in spaces between oxide spacers located on either side of spaces between adjacent amorphous silicon mandrels; and
using reactive ion etching with the second gas to transfer the second critical dimension to the second block and to transfer a spacer width for each oxide spacer to the titanium containing anti-reflective coating layer.

15. The method of claim 14 , wherein the first gas comprises chlorine gas and the second gas comprises carbon tetraflouride gas.

16. The method of claim 14 , further comprising
filling all spaces between oxide spacers located on either side of spaces between adjacent amorphous silicon mandrels with a backfill organic planarization layer following reactive ion etching with the first gas; and
using reactive ion etching with hydrogen bromide to remove the amorphous silicon mandrels before reactive ion etching with the second gas.

17. The method of claim 16 , further comprising:
using plasma etching to remove the backfill organic planarization layer; and
using oxide reactive ion etching to remove the plurality of oxide spacers and to etch a final pattern into an oxide layer below the sacrificial layer, the final pattern defined by the second block, the first block and the spacers widths in the titanium containing anti-reflective coating layer corresponding to each oxide spacer in the plurality of oxide spacers in the sa

Assignees

• IBM

Inventors

• Arnold John Christopher
• Burns Sean D
• MIGNOT Yann Alain Marcel
• Xu Yongan

Classifications

• H10P76/2043

  using an anti-reflective coating · CPC title

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P50/695

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title

• H10P50/691

  for Group V materials or Group III-V materials · CPC title

• H10P50/642

  Chemical etching · CPC title