Film forming apparatus

Patent metadata

Field	Value
Publication number	US-10030603-B2
Application number	US-201715713901-A
Country	US
Kind code	B2
Filing date	Sep 25, 2017
Priority date	Sep 27, 2016
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

The film forming apparatus includes a mask member and a shield member. The mask member is made of a cylindrical insulation material that can expose inner surfaces of cylinder bores, and mask the inner surface of a crankcase. The shield member is made of a metal material disposed along an inner surface of the mask member.

First claim

What is claimed is:

1. A film forming apparatus configured to form a film on an inner surface of a cylindrical work, the film forming apparatus comprising:
a mask member of a cylindrical shape made of an insulation material, and configured to expose a film formation portion of the inner surface of the work at which the film is formed, and mask a non-formation portion of the inner surface of the work at which the film is not formed; and
a shield member disposed along an inner surface of the mask member and made of a metal material.

2. The film forming apparatus according to claim 1 , wherein:
at least part of the mask member is in contact with the inner surface of the work; and
the shield member is distant from the work.

3. The film forming apparatus according to claim 1 , wherein, when the work is a cylinder block, the mask member is configured to expose an inner surface of a cylinder bore of the cylinder block as the film formation portion, and mask an inner surface of a crankcase of the cylinder block as the non-formation portion.

4. The film forming apparatus according to claim 3 , further comprising:
a source gas supply device configured to supply a source gas of the film to a cylinder of the cylinder block;
a housing configured to house the cylinder block;
a closing member disposed between the source gas supply device and the housing;
a manifold connected to an exhaust unit configured to exhaust a gas in the cylinder;
an anode case disposed between and electrically insulated from the housing and the manifold, and made of a conductive material; and
an anode electrode disposed in and electrically insulated from the anode case, and configured to produce a potential difference from the cylinder block.

5. The film forming apparatus according to claim 4 , wherein:
the shield member extends from an interior of the mask member to an interior of the anode case; and
the shield member and the anode case are electrically insulated from each other.

Assignees

• Honda Motor Co Ltd
• Honda Motor Co Ltd

Inventors

• Funatsu Junya
• Kobayashi Koji

Classifications

• C23C16/045

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/042

  using masks · CPC title

• C23C16/0245 Primary

  by etching with a plasma · CPC title

• C23C16/04

  Coating on selected surface areas, e.g. using masks · CPC title