Substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10026627-B2
Application number	US-201615383718-A
Country	US
Kind code	B2
Filing date	Dec 19, 2016
Priority date	Aug 31, 2012
Publication date	Jul 17, 2018
Grant date	Jul 17, 2018

Abstract

A substrate processing apparatus includes a chamber, a substrate holding part, a substrate rotating mechanism, and a processing liquid supply part. The chamber includes a chamber body and a chamber cover, and the chamber cover is moved up and down by a chamber opening and closing mechanism. A top plate is attached to the chamber cover. While the chamber cover is in contact with the chamber body, a sealed space is formed and processing is performed. When the chamber cover is moved up, an annular opening is formed between the chamber cover and the chamber body. A cup part is positioned outside the annular opening. A processing liquid spattering from a substrate is received by the cup part.

First claim

The invention claimed is:

1. A substrate processing apparatus for processing a substrate, comprising:
a chamber having a chamber cover which forms therein an internal space which is sealed when said chamber is closed;
a chamber cover elevator for moving up and down said chamber cover including an upper portion of said chamber relative to the other portion of said chamber to open and close said chamber;
a substrate holder holding a substrate horizontally, said substrate holder being disposed in said chamber;
a substrate rotator rotating said substrate together with said substrate holder about a central axis oriented in a vertical direction;
a processing liquid supply nozzle supplying a processing liquid onto said substrate; and
a top plate which has a plate-like shape perpendicular to said central axis and is attached to said chamber cover rotatably about said central axis, being engaged with said substrate holder in a circumferential direction about said central axis and being rotated together with said substrate holder by said substrate rotator while said chamber forms said internal space which is sealed.

2. The substrate processing apparatus according to claim 1 , wherein
said processing liquid supply nozzle includes a nozzle for supplying said processing liquid between said top plate and said substrate by ejecting said processing liquid from the center of said top plate while said top plate is engaged with said substrate holder.

3. The substrate processing apparatus according to claim 2 , further comprising:
a gas supply nozzle supplying gas between said top plate and said substrate while said top plate is engaged with said substrate holder.

4. The substrate processing apparatus according to claim 1 , further comprising:
a cup part positioned around said chamber,
wherein while an annular opening is formed around said substrate by a movement of said chamber cover, said cup part is positioned on an outer side in a radial direction relative to said annular opening to receive said processing liquid spattering from said substrate being rotated.

5. The substrate processing apparatus according to claim 4 , wherein
said top plate is attached to said chamber cover with a distance with said chamber cover being changeable,
said top plate is engaged with said substrate holder in said circumferential direction when a distance between said chamber cover and said other portion of said chamber is a first distance, and
said top plate is apart from said substrate holder when said distance between said chamber cover and said other portion of said chamber is a second distance larger than said first distance.

6. The substrate processing apparatus according to claim 4 , further comprising:
a cup elevator moving said cup part up and down, to thereby move said cup part between one position on an outer side in said radial direction relative to said annular opening and another position lower than said one position.

7. The substrate processing apparatus according to claim 6 , further comprising:
another cup part positioned on an outer side in said radial direction relative to said chamber,
wherein said cup elevator moves said cup part up and down, to thereby switch between a state in which said cup part receives said processing liquid from said substrate and another state in which said another cup part receives said processing liquid from said substrate.

8. The substrate processing apparatus according to claim 4 , wherein
an upper portion of said cup part is close to or in contact with said upper portion of said chamber while said cup part receives said processing liquid spattering from said substrate.

9. The substrate processing apparatus according to claim 4 , wherein
said chamber receives isopropyl alcohol or water spattering from said substrate while the inside of said chamber is sealed, and
said cup part receives said processing liquid spattering from said substrate while said annular opening is formed.

Assignees

• Screen Holdings Co Ltd

Inventors

• Nakai Hitoshi
• Ohashi Yasuhiko

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/0458

  vertical arrangement · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title