Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices

Patent metadata

Field	Value
Publication number	US-10024929-B2
Application number	US-201715430797-A
Country	US
Kind code	B2
Filing date	Feb 13, 2017
Priority date	Jul 23, 2013
Publication date	Jul 17, 2018
Grant date	Jul 17, 2018

Abstract

A first apparatus includes a vapor cell having first and second cavities fluidly connected by multiple channels. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity. A second apparatus includes a vapor cell having a first wafer with first and second cavities and a second wafer with one or more channels fluidly connecting the cavities. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity.

First claim

What is claimed is:

1. An apparatus comprising: a vapor cell having first and second cavities fluidly connected by at least one channel; the first cavity configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell; the second cavity configured to receive the one or more gases; wherein the vapor cell is configured to allow radiation to pass through the second cavity; a silicon wafer comprising the cavities and the at least one channel; and an optically transparent wafer secured to the silicon wafer, wherein the optically transparent wafer is thinner over a central portion of the first cavity than over the second cavity due to a recess in the first optically transparent wafer that does not extend through the optically transparent wafer and wherein the first and second cavities do not extend into the optically transparent wafer.

2. The apparatus of claim 1 , wherein the material comprises an alkali-based material able to dissociate into a metal vapor and a buffer gas.

3. The apparatus of claim 2 , wherein the material comprises cesium azide (CsN 3 ) and is able to dissociate into cesium vapor and nitrogen gas (N 2 ).

4. A system comprising:
a vapor cell comprising:
first and second cavities fluidly connected by at least one channel;
the first cavity configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell; and
the second cavity configured to receive the one or more gases;

an illumination source configured to direct radiation through the second cavity;
a first wafer comprising the cavities and the at least one channel; and
a second wafer having a top surface and a bottom surface where the bottom surface is secured to the first wafer, the second wafer sealing ends of the cavities and the at least one channel wherein the first and second cavities do not extend into the second wafer, wherein the second wafer has a recess in the top surface over a central portion of the first cavity and no recess in the top surface in a location proximate the second cavity, wherein the recess extends only partially through the second wafer.

5. The system of claim 4 , further comprising:
clock generation circuitry configured to generate a clock signal based on the radiation directed through the second cavity.

6. The system of claim 4 , further comprising:
a magnetic field calculator configured to determine a measurement of a magnetic field through the vapor cell based on the radiation directed through the second cavity.

7. The system of claim 4 , wherein the material comprises an alkali-based material able to dissociate into a metal vapor and a buffer gas.

8. The system of claim 7 , wherein the material comprises cesium azide (CsN 3 ) and is able to dissociate into cesium vapor and nitrogen gas (N 2 ).

9. An Apparatus, comprising:
a first and a second optically transparent wafer; and
a silicon wafer between the first and second optically transparent wafers, wherein:
the silicon wafer includes a first cavity and a second cavity fluidly connected to each other via at least one channel to form a vapor cell;
the first cavity and the second cavity extend from the first optically transparent wafer to the second optically transparent wafer;
the at least one channel extends laterally from the first cavity to the second cavity and vertically between the silicon wafer and the first optically transparent wafer;
the first optically transparent wafer is thinner in a central location over the first cavity than at any location over the second cavity due to a recess in the first optically transparent wafer that does not extend through the first optically transparent wafer; and
the first cavity is smaller than the second cavity.

10. The system of claim 9 , wherein the material comprises cesium azide (CsN 3 ).

11. The system of claim 9 , further comprising clock generation circuitry.

12. The system of claim 9 , further comprising a magnetic field calculator.

Assignees

• Texas Instruments Inc

Inventors

• Parsa Roozbeh
• Hopper Peter J

Classifications

• G04F5/14

  using atomic clocks · CPC title

• G01R33/032 Primary

  using magneto-optic devices, e.g. Faraday {or Cotton-Mouton effect} · CPC title

• H01S1/06

  Gaseous {, i.e. beam masers} · CPC title

• Y10T137/8593

  Systems · CPC title