Method for determining a beamlet position and method for determining a distance between two beamlets in a multi-beamlet exposure apparatus
US-9653259-B2 · May 16, 2017 · US
US10023396B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10023396-B2 |
| Application number | US-201114124657-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 6, 2011 |
| Priority date | Jun 7, 2011 |
| Publication date | Jul 17, 2018 |
| Grant date | Jul 17, 2018 |
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A device for separating piece goods to be stored in an automated storage facility is provided. The device includes a conveyor for conveying piece goods from a stock to a support surface of a collecting device, a controller for controlling the conveyor, a sensor, to detect the striking of the support surface by piece goods. The detector has an imager, which produces at least one recording of the underside of the support. A handling device is configured to remove a piece good from the support surface for further transport into the storage facility is coupled to the controller, which is further configured to control the handler according to the information.
Opening claim text (preview).
The invention claimed is: 1. A separating device, comprising: a conveyor configured to transfer piece goods from a stock to a support surface of a collector; a controller configured to control the conveyor; a sensor that is coupled to the controller and detects an imminent or actual impact of piece goods on the support surface, wherein the controller is further configured to interrupt a conveying of additional piece goods onto the support surface as soon as an impact of a piece good or several piece goods has been detected; a detector that is coupled to the controller and serves for detecting a position and an orientation of the piece goods lying on the support surface, wherein the detector comprises an imager configured to record images of an underside of the support surface of the collector and the controller is further configured to obtain information on the position and orientation of the piece goods lying on the support surface from said images; and a handler that is coupled to the controller and serves for removing a piece good from the support surface for further transport into a storage facility, wherein the controller is configured to control the handler according to the information on position and orientation such that it takes hold of an individual piece good, wherein: the detector comprises a light source that is arranged above the support surface and generates at least one luminous beam that is incident on the support surface in a transverse fashion, the at least one luminous beam either covers the support surface to be detected or is moved such that it successively passes over the support surface to be detected, the collector transmits light of the light source passing through the support surface and scatters or deflects this light of the light source at every point of the support surface such that at least part of the light is directed at the imager, the light source arranged above the support surface generates multiple luminous beams that are transversely incident on the support surface, and that are spaced apart by a pre-selected resolution, the light source is movable, and the luminous beams expose a strip that extends over the support surface in a first direction, and the controller is further configured to move the light source over the support surface in a second direction extending transverse to the first direction. 2. The separating device according to claim 1 , wherein a material of the collector underneath the support surface transmits and diffusely scatters the light of the light source. 3. The separating device according to claim 1 , wherein the collector comprises a plate, an upper side of which forms the support surface. 4. The separating device according to claim 1 , wherein the imager is further configured to record an image during a motion of the strip a sequence of images of the underside of the support surface, from which a depiction of the support surface is produced, wherein the information on the position and orientation of the piece goods required for an activation of the handler is obtained from said depiction, and wherein a time interval between the images corresponds to a time period, in which the strip moves by a distance that approximately corresponds to a width of the strip. 5. The separating device according to claim 3 , wherein the light source is an infrared light source and the plate features a plastic that transmits and diffusely scatters an infrared light from the infrared light source. 6. The separating device according to claim 1 , wherein the light source comprises a plurality of LEDs that are adjacently arranged on a substrate along a first direction (y) and equidistantly spaced apart from one another, wherein each LED emits a luminous beam with an aperture angle of less than 5°. 7. The separating device according to claim 6 , wherein the plurality of LEDs emit the luminous beams vertically downward and the substrate is movable in a second direction (x). 8. The separating device according to claim 6 , wherein the plurality of LEDs emit the luminous beams horizontally and a mirror arranged parallel to a stationary substrate of the plurality of LEDs deflects the luminous beams vertically downward and is arranged such that it can be moved in a second direction (x). 9. The separating device according to claim 1 , wherein the first direction (y) extends transverse to a transport direction of the conveyor, from which the piece goods arrive on the support surface. 10. The separating device according to claim 1 , wherein the controller is further configured to control the light source in such a way that the strip continuously moves over the support surface in one pass. 11. The separating device according to claim 1 , wherein the handler is suspended and guided on a linear guide that is mounted above the support surface and extends in the second direction (x), and the light source is suspended and guided on the linear guide. 12. A separating device for separating piece goods to be stored in a storage facility, comprising: a conveyor configured to transfer piece goods from a stock to a support surface of a collector; a controller configured to control the conveyor; a sensor that is coupled to the controller and detects an imminent or actual impact of a piece good on the support surface, wherein the controller interrupts a conveying of additional piece goods onto the support surface in response to detection of an impact; a detector coupled to the controller, the detector configured to detect a position and orientation of the piece good lying on the support surface, wherein the detector comprises an imager configured to record images of an underside of the support surface of the collector and the controller is further configured to obtain information on the position and orientation of the piece good lying on the support surface from said images; and a handler, coupled to the controller, the handler configured to remove a piece good from the support surface for further transport to the storage facility, wherein the controller is further configured to control the handler based on the information on position and orientation, wherein the detector comprises, above the support surface, a light source that generates multiple light beams that are transversely incident on the support surface, the light beams cover the support surface to be detected, the light source is movable, and the light beams expose a strip that extends over the support surface in a first direction, and the collector transmits light of the light source passing through the support surface and scatters or deflects this light such that at least part of the light is directed at the imager. 13. The separating device according to claim 12 , wherein the light beams are spaced apart from one another by no more than a maximum distance that corresponds to a pre-selected resolution. 14. The separating device according to claim 12 , wherein the collector comprises a plate, an upper side of which forms the support surface, and wherein the light source comprises an infrared light source and the plate features a material that transmits and diffusely scatters infrared light. 15. A separating device for separating piece goods to be stored in a storage facility, comprising: a conveyor configured to transfer piece goods from a stock to a support surface of a collector; a controller configured to control the conveyor; a sensor that is coupled to the controller and detects an imminent or actual impact of a piece good on the support surface, wherein the controller interrupts a conveying of additional piece goods onto th
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