Method of manufacturing organic light-emitting display apparatus and organic light-emitting display apparatus

Patent metadata

Field	Value
Publication number	US-10020447-B2
Application number	US-201815861541-A
Country	US
Kind code	B2
Filing date	Jan 3, 2018
Priority date	Oct 23, 2015
Publication date	Jul 10, 2018
Grant date	Jul 10, 2018

Abstract

A method of manufacturing an organic light-emitting display apparatus using a light-blocking photoresist layer which minimizes damage to an intermediate layer, including an emission layer, during a process for manufacturing the organic light-emitting display apparatus.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming a first pixel electrode and a second pixel electrode that are spaced apart from each other;
forming an insulating layer that covers the first pixel electrode and the second pixel electrode;
patterning the insulating layer to cover the second pixel electrode and to expose at least a center portion of the first pixel electrode;
forming a first intermediate layer comprising a first emission layer over the exposed center portion of the first pixel electrode and the insulating layer;
forming a first upper electrode over the first intermediate layer to correspond to at least the first pixel electrode;
forming a light-blocking first photoresist layer over the first upper electrode to correspond to the first pixel electrode and not to correspond to the second pixel electrode;
is removing parts of the first intermediate layer and the first upper electrode that are exposed outside the first photoresist layer;
removing the first photoresist layer;
patterning the insulating layer to expose at least a center portion of the second pixel electrode;
forming a second intermediate layer comprising a second emission layer over the exposed center portion of the second pixel electrode and the first upper electrode;
forming a second upper electrode over the second intermediate layer to correspond to at least the second pixel electrode;
forming a light-blocking second photoresist layer over the second upper electrode to correspond to the second pixel electrode and not to correspond to the first pixel electrode;
removing parts of the second intermediate layer and the second upper electrode that are exposed outside the second photoresist layer; and
removing the second photoresist layer.

2. The method of claim 1 , further comprising, between the removing of the first photoresist layer and the exposing of at least the center portion of the second pixel electrode, forming a first protection layer corresponding to the first pixel electrode to cover the first intermediate layer and the first upper electrode.

3. The method of claim 2 , wherein the forming of the first protection layer comprises forming the first protection layer to cover an upper surface of the first upper electrode, a side surface of the first upper electrode, and a side surface of the first intermediate layer.

4. The method of claim 2 , further comprising forming a second protection layer corresponding to the second pixel electrode to cover the second intermediate layer and the second upper electrode.

5. The method of claim 4 , wherein the forming of the second protection layer comprises forming the second protection layer to cover upper surfaces and side surfaces of the second intermediate layer and the second upper electrode.

6. The method of claim 5 , wherein the forming of the second protection layer comprises forming the second protection layer to contact the first protection layer.

7. The method of claim 4 , further comprising:
forming a filling layer that covers the first protection layer and the second protection layer;
forming contact holes in the filling layer, the first protection layer, and the second protection layer to expose at least a part of each of the first upper electrode and the second upper electrode; and
forming a common electrode over the filling layer to contact the first upper electrode and the second upper electrode through the contact holes.

8. The method of claim 1 , further comprising, between the forming of the first upper electrode and the forming of the first photoresist layer, forming a first protection layer over the first upper electrode,
wherein:
the forming of the first photoresist layer comprises forming the first photoresist layer over the first protection layer; and
the removing of the parts of the first intermediate layer and the first upper electrode that are exposed outside the first photoresist layer comprises removing parts of the first intermediate layer, the first upper electrode, and the first protection layer that are exposed outside the first photoresist layer.

9. The method of claim 8 , further comprising, between the forming of the second upper electrode and the forming of the second photoresist layer, forming a second protection layer over the second upper electrode,
wherein:
the forming of the second photoresist layer comprises forming the second photoresist layer over the second protection layer; and
wherein the removing of the parts of the second intermediate layer and the second upper electrode that are exposed outside the second photoresist layer comprises removing parts of the second intermediate layer, the second upper electrode, and the second protection layer that are exposed outside the second photoresist layer.

10. The method of claim 9 , further comprising:
forming a filling layer that covers the first protection layer and the second protection layer;
forming contact holes in the filling layer, the first protection layer, and the second protection layer to expose at least a part of each of the first upper electrode and the second upper electrode; and
forming a common electrode over the filling layer to contact the first upper electrode and the second upper electrode through the contact holes.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Waljun
• Kim Yeonhong
• Kim Junghyun
• Kim Jongyun
• Lee Sungeun
• Choi Kwangyoung

Classifications

• H01L2227/323

  Electricity · mapped topic

• H01L51/5012

  Electricity · mapped topic

• H01L51/56

  Electricity · mapped topic

• H01L51/0018 Primary

  Electricity · mapped topic

• H01L27/3244

  Electricity · mapped topic