Feedback control of dimensions in nanopore and nanofluidic devices
US-2016355942-A1 · Dec 8, 2016 · US
US10006139B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10006139-B2 |
| Application number | US-201514755916-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 30, 2015 |
| Priority date | Jul 7, 2014 |
| Publication date | Jun 26, 2018 |
| Grant date | Jun 26, 2018 |
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Disclosed is a solution composition which may be used for a single-bath electrochemical passivation and a method using the same. The solution composition includes a metal cation, a metal-oxide anion; and an organic ligand, and optionally includes a non-metallic oxide anion or a polymer. The solution composition may prevent undesired precipitation of metal oxides before performing passivation. In addition, the method of passivation using the solution composition in a single-bath use is also provided.
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What is claimed is: 1. A method of single-bath passivation post-treatment, comprising: preparing a solution composition; applying the solution composition to a substrate; applying an electric current to the substrate to perform an electrode deposition; wherein the solution composition comprises: a metal cation; a metal-oxide anion; an organic ligand; a non-metallic oxide anion; and a polymer and further wherein the metal cation is Ce 3+ , Y 3+ , La 3+ , Pr 3+ , Sm 3+ , or mixtures thereof; the metal-oxide anion is VO 3 − , MoO 4 2− , WO 4 2− or mixtures thereof; the organic ligand is acetic acid, lactic acid, citric acid, oxalic acid, salicylic acid, tartaric acid, ethylenediaminetetraacetic acid (EDTA) and mixtures thereof; the non-metallic oxide anion is PO 4 3− , SiO 3 − , B 2 O 4 2− and mixtures thereof; and the polymer is polyacrylic acid, polyol, polyethylene glycol, or mixtures thereof. 2. The method of claim 1 , wherein the electric current applied to the substrate is a forward pulse electric current or a reverse pulse electric current. 3. The method of claim 1 , further comprising, applying a secondary electric current to the substrate in the solution composition to perform a second electrode deposition. 4. The method of claim 1 , wherein a cycle for when the electric current is applied to the substrate comprises about 100 ms of t c , about 20 ms of t a , and about 40 ms of t off as one cycle time. 5. The method of claim 1 , wherein the electric current applied to substrate is in a range of about 0.06 to 1.0 mA/cm 2 . 6. The method of claim 1 , wherein pH of the solution composition is in a range of about pH 7.0 to about pH 11.0. 7. The method of claim 1 , wherein a temperature of the solution composition is in a range of about 25 to 50° C. 8. The method of claim 1 , wherein the solution composition is aerated with air or oxygen gas (O 2 ) during the electrode deposition.
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