Substrate cleaning apparatus

Patent metadata

Field	Value
Publication number	US-10002778-B2
Application number	US-201514736036-A
Country	US
Kind code	B2
Filing date	Jun 10, 2015
Priority date	Jun 10, 2014
Publication date	Jun 19, 2018
Grant date	Jun 19, 2018

Abstract

A substrate cleaning apparatus includes outer circumference supporting members 32 that support the outer circumference of a rotating substrate W, a swing cleaning member 34 that swings between a first peripheral position B and a second peripheral position B′ of the substrate W while passing a center portion A of the substrate W to clean a front surface of the rotating substrate W, and an elongated supporting member 36 that extends long from a third peripheral position C to a fourth peripheral position C′ of the substrate W so as to pass the center portion A and supports the rear surface of the rotating substrate W. The first peripheral position B is disposed between a position D of the outer circumference supporting member 32 of the plurality of outer circumference supporting members 32 and closest to the third peripheral position C and the third peripheral position C.

First claim

What is claimed is:

1. A substrate cleaning apparatus, comprising:
a plurality of outer circumference supporting members that support outer circumference of a rotating substrate;
a swing cleaning member that swings between a first peripheral position and a second peripheral position of the substrate while passing a center portion of the substrate to clean a front surface of the substrate, wherein the swing cleaning member comprises a flat bottom surface configured to clean the front surface of the substrate, and a portion of the flat bottom surface configured to clean the front surface protrudes from an outer circumference of the substrate when the swing cleaning member is at the first and the second peripheral positions;
an elongated supporting member that extends long from a third peripheral position and a fourth peripheral position of the substrate so as to pass the center portion of the substrate and supports the rear surface of the rotating substrate, and
a control portion that controls a pressing force by the swing cleaning member on the substrate depending on an area of the swing cleaning member that contacts with the substrate to make constant pressure by the swing cleaning member on the substrate when a portion of the flat bottom surface configured to clean the front surface of the substrate protrudes from the outer circumference of the substrate, wherein
one of the first peripheral position and the second peripheral position is disposed between a position of an outer circumference supporting member closest to the third peripheral position and the third peripheral position, or between a position of an outer circumference supporting member closest to the fourth peripheral position and the fourth peripheral position.

2. The substrate cleaning apparatus according to claim 1 , wherein
an angle formed between a line segment AB connecting a center position A and a first peripheral position B of the substrate and a line segment AC connecting the center position A and a third peripheral position C of the substrate is set to be not greater than an angle formed between a line segment AD connecting the center position A of the substrate and a position D of the outer circumference supporting member and closest to the third peripheral position and the line segment AC connecting the center position A and the third peripheral position C of the substrate.

3. The substrate cleaning apparatus according to claim 1 , wherein
the swing cleaning member is a pencil scrub cleaning member, and
the pencil scrub cleaning member comprises a cleaning sponge that contacts with the front surface of the substrate and a holding member that holds the cleaning sponge, wherein
the cleaning sponge comprises a body portion whose lower surface contacts with the front surface of the substrate and a neck portion that is provided to stand on an upper surface of the body portion and is held by the holding member, and
in a root end portion of the neck portion, a recess is provided, and in the upper surface of the body portion, a concave portion or a convex portion is provided.

4. The substrate cleaning apparatus according to claim 1 , wherein
the swing cleaning member is a pencil scrub cleaning member, and
the pencil scrub cleaning member comprises a cleaning sponge that contacts with the front surface of the substrate and a holding member that holds the cleaning sponge, wherein
the cleaning sponge comprises a body portion whose lower surface contacts with the front surface of the substrate and a neck portion that is provided to stand on an upper surface of the body portion and is held by the holding member, and
in the upper surface of the body portion, a concave portion or a convex portion is provided.

5. The substrate cleaning apparatus according to claim 1 , wherein
the elongated supporting member is a roll member, and
in a front surface of the roll member, a plurality of convex portions are provided, wherein
an outermost convex portion of the plurality of convex portions is situated on the inside of an outer circumferential portion of the substrate.

6. The substrate cleaning apparatus according to claim 1 , wherein
the elongated supporting member comprises a first rotary roll member from the center portion to the third peripheral position of the substrate and a second rotary roll member from the center portion to the fourth peripheral position of the substrate, wherein
a rotation direction of the first rotary roll member and a rotation direction of the second rotary roll member are set to be the same direction as a rotation direction of the substrate.

7. A substrate cleaning apparatus, comprising:
a plurality of outer circumference supporting members that support outer circumference of a rotating substrate;
a swing cleaning member for oscillating from/to a first peripheral position of the substrate through a center portion of the substrate to clean a front surface of the substrate, wherein the swing cleaning member comprises a flat bottom surface configured to clean the front surface of the substrate, and a portion of the flat bottom surface configured to clean the front surface of the substrate protrudes from an outer circumference of the substrate when the swing cleaning member is at the first peripheral position;
an elongated supporting member that extends long from a third peripheral position and a fourth peripheral position of the substrate so as to pass the center portion of the substrate and supports the rear surface of the substrate, and
a control portion that controls a pressing force by the swing cleaning member on the substrate depending on an area of the swing cleaning member that contacts with the substrate to make constant pressure by the swing cleaning member on the substrate when a portion of the flat bottom surface configured to clean the front surface of the substrate protrudes from the outer circumference of the substrate, wherein
the first peripheral position is disposed between a position of an outer circumference supporting member closest to the third peripheral position and the third peripheral position, or between a position of an outer circumference supporting member closest to the fourth peripheral position and the fourth peripheral position.

Assignees

• Ebara Corp

Inventors

• Ishibashi Tomoatsu

Classifications

• H10P72/0412 Primary

  using mainly scrubbing means, e.g. brushes · CPC title

• B08B1/001

  Operations & Transport · mapped topic

• B08B11/02

  Devices for holding articles during cleaning {(B08B9/42 takes precedence)} · CPC title

• H01L21/67046 Primary

  Electricity · mapped topic

• B08B1/04

  Operations & Transport · mapped topic