Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US10001308B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10001308-B2 |
| Application number | US-201114361314-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2011 |
| Priority date | Dec 22, 2011 |
| Publication date | Jun 19, 2018 |
| Grant date | Jun 19, 2018 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A refrigeration cycle device circulates a refrigerant, which is a zeotropic refrigerant mixture. In a refrigeration cycle, a compressor, a condenser, an expansion valve, and an evaporator are connected by a refrigerant pipe. The refrigeration cycle device calculates a circulation composition value of the refrigerant based on states before and after the refrigerant temperature and the refrigerant pressure change during the operation of the refrigeration cycle, calculates dT for calibrating a second temperature sensor and dP for calibrating a pressure sensor, based on a reference composition value and the circulation composition value of the refrigerant, corrects the value of the temperature of the refrigerant on an outlet side based on dT, corrects the value of the pressure of the refrigerant based on dP, and operates the refrigeration cycle.
Opening claim text (preview).
The invention claimed is: 1. A refrigeration cycle device that circulates a zeotropic refrigerant mixture through a refrigeration cycle in which a compressor, a condenser, an expansion valve, and an evaporator are connected by a refrigerant pipe, comprising: a first temperature sensor that detects refrigerant temperature on an inlet side of a portion in which the zeotropic refrigerant mixture discharged from the compressor is in a two-phase gas-liquid state, thereby obtaining a detected temperature value; a second temperature sensor that detects refrigerant temperature on an outlet side of the portion in which the zeotropic refrigerant mixture discharged from the compressor is in the two-phase gas-liquid state, thereby obtaining a detected temperature value; a pressure sensor that detects a refrigerant pressure on the outlet side, thereby obtaining a detected pressure value; and a correction control unit configured to replace at least one of output values of the detected temperature value of the zeotropic refrigerant mixture in the two-phase gas-liquid state on the outlet side detected by the second temperature sensor and the detected pressure value of the pressure of the zeotropic refrigerant mixture in the two-phase gas-liquid state detected by the pressure sensor with a corresponding corrected temperature value or pressure value, the corresponding corrected temperature value or pressure value is obtained based on a reference composition value α* and a circulation composition value α cal , the circulation composition value α cal being calculated by the detected temperature values of the zeotropic refrigerant mixture detected by the first and the second temperature sensors and the detected pressure value of the zeotropic refrigerant mixture detected by the pressure sensor. 2. The refrigeration cycle device of claim 1 , wherein the zeotropic refrigerant mixture contains two or more components, one of which is R32 serving as a low-boiling-point refrigerant. 3. The refrigeration cycle device of claim 1 , wherein the zeotropic refrigerant mixture contains two or more components, one of which is a hydrofluoroolefin-based refrigerant serving as a high-boiling-point refrigerant. 4. The refrigeration cycle device of claim 1 , further comprising: a detection control unit, wherein the detection control unit calculates a circulation composition value α cal of the zeotropic refrigerant mixture, based on the detected temperature values of the zeotropic refrigerant mixture detected by the first and the second temperature sensors and the detected pressure value of the pressure of the zeotropic refrigerant mixture detected by the pressure sensor, the correction control unit calculates the reference composition value α*, which is a reference circulation composition value, based on a filling composition of the zeotropic refrigerant mixture at a time of filling in the refrigeration cycle, and calculates at least one of a temperature correction value for correcting a detection result obtained by the second temperature sensor for detecting the refrigerant temperature on the outlet side and a pressure correction value for correcting a detection result obtained by the pressure sensor, based on the reference composition value α* and the circulation composition value α cal of the zeotropic refrigerant mixture, and the refrigeration cycle device is controlled in operation, based on the value corrected by the correction control unit. 5. The refrigeration cycle device of claim 4 , wherein the correction control unit corrects the detection result obtained by the pressure sensor and the detection results obtained by the temperature sensors, and the correction control unit operates in one of a first and a second state, which are different from each other: in the first state a first refrigerant circulation composition value α cal 1 obtained by the detection control unit by operating the refrigeration cycle is allowed to be estimated and match the reference composition value α*, and in the second state a second refrigerant circulation composition value α cal 2 obtained by the detection control unit by operating the refrigeration cycle is allowed to be estimated and match the reference composition value α*. 6. The refrigeration cycle device of claim 4 , wherein the correction control unit corrects the detection result obtained by the pressure sensor where the circulation composition value α cal obtained by operating the refrigeration cycle in a state in which the circulation composition value α cal of the zeotropic refrigerant mixture is allowed to be estimated matches the reference composition value α*. 7. The refrigeration cycle device of claim 4 , wherein the correction control unit corrects the detection result obtained by the second temperature sensor where the circulation composition value α cal obtained by operating the refrigeration cycle in a state in which the circulation composition value α cal of the zeotropic refrigerant mixture is allowed to be estimated matches the reference composition value α*. 8. The refrigeration cycle device of claim 4 , further comprising: a bypass pipe that branches off from a discharge side of the compressor and is connected to a suction side of the compressor; a decompression mechanism that is provided at the bypass pipe and decompresses the zeotropic refrigerant mixture discharged from the compressor; and a high-and-low-pressure heat exchanger that exchanges heat between the zeotropic refrigerant mixture on an upstream side of the decompression mechanism and the zeotropic refrigerant mixture on a downstream side of the decompression mechanism, wherein the first temperature sensor is arranged on the upstream side of the decompression mechanism and the second temperature sensor is arranged on the downstream side of the decompression mechanism, the pressure sensor is arranged on the downstream side of the decompression mechanism, and the detection control unit calculates the circulation composition value α cal of the zeotropic refrigerant mixture, based on a state of the zeotropic refrigerant mixture on the downstream side of the decompression mechanism. 9. The refrigeration cycle device of claim 4 , wherein the detection control unit sets an assumed value α of the circulation composition value of the zeotropic refrigerant mixture, calculates a refrigerant quality, based on the detected temperature value of the zeotropic refrigerant mixture on the inlet side detected by the first temperature sensor, the detected pressure value of the zeotropic refrigerant mixture on the outlet side detected by the pressure sensor, and the assumed value α of the circulation composition value of the zeotropic refrigerant mixture, calculates a circulation composition value α′ of the zeotropic refrigerant mixture, based on the detected temperature value of the zeotropic refrigerant mixture on the outlet side detected by the second temperature sensor, the detected pressure value of the zeotropic refrigerant mixture on the outlet side detected by the pressure sensor, and the refrigerant quality, and sets the assumed value α of the circulation composition value of the zeotropic refrigerant mixture to the circulation composition value α cal of the zeotropic refrigerant mixture where the assumed value α of the circulation composition value of the zeotropic refrigerant mixture matches the circulation composition value α′ of the zeotropic refrigerant mixture. 10. The refrigeration cycle device of claim 4 , further comprising: an accumulator that is connected between the evaporator and the compressor and accumulates an excess zeotropic refrigerant mixture of the zeotropic refrigerant mixture
of safety devices (F25B49/02 and F25B49/04 take precedence) · CPC title
the refrigerant containing more than one component (F25B9/004 takes precedence) · CPC title
Refrigeration machines, plants and systems having means for detecting the concentration of a refrigerant · CPC title
for compression type machines, plants or systems · CPC title
Calculation of parameters · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.