Auto-correlation of wafer characterization data and generation of composite wafer metrics during semiconductor device fabrication
US-11454949-B2 · Sep 27, 2022 · US
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Zhong Yuan patents
Zhong Yuan is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Zhong Yuan |
| Total patents | 6 |
| First publication | Jan 17, 2019 |
| Latest publication | Sep 27, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Metrics for asymmetric wafer shape characterization
US-11393118-B2 · Jul 19, 2022 · US
Metrics for asymmetric wafer shape characterization
US-2020402252-A1 · Dec 24, 2020 · US
Auto-Correlation of Wafer Characterization Data and Generation of Composite Wafer Metrics During Semiconductor Device Fabrication
US-2019302734-A1 · Oct 3, 2019 · US
Dynamic proximity object detection
US-10379672-B2 · Aug 13, 2019 · US
Dynamic proximity object detection
US-2019018539-A1 · Jan 17, 2019 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 3 |
| Kla Tencor Corp | 2 |
| Synaptics Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/23 | 2 |
| H10P74/27 | 2 |
| H10P74/20 | 2 |
| H10P72/0604 | 2 |
| H10P72/0612 | 2 |