Dose reduction of patterned metal oxide photoresists
US-11994800-B2 · May 28, 2024 · US
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Yan Lifan patents
Yan Lifan is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yan Lifan |
| Total patents | 6 |
| First publication | Aug 27, 2020 |
| Latest publication | May 28, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Dose reduction of patterned metal oxide photoresists
US-2023115004-A1 · Apr 13, 2023 · US
Dose reduction of patterned metal oxide photoresists
US-11550222-B2 · Jan 10, 2023 · US
Film stack for lithography applications
US-11495461-B2 · Nov 8, 2022 · US
Dose reduction of patterned metal oxide photoresists
US-2021033974-A1 · Feb 4, 2021 · US
Film stack for lithography applications
US-2020273705-A1 · Aug 27, 2020 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/405 | 6 |
| H10P76/4085 | 6 |
| H01L21/0332 | 6 |
| H10P76/2041 | 4 |
| H10P50/692 | 4 |