MEMS microphone and preparation method therefor
US-12022270-B2 · Jun 25, 2024 · US
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Xia Changfeng patents
Xia Changfeng is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Xia Changfeng |
| Total patents | 13 |
| First publication | Apr 14, 2015 |
| Latest publication | Jun 25, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Micro-Electro-Mechanical System device
US-11671765-B2 · Jun 6, 2023 · US
Mems microphone and preparation method therefor
US-2022386052-A1 · Dec 1, 2022 · US
Micro-electro-mechanical system device
US-2022086571-A1 · Mar 17, 2022 · US
Method of forming cavity based on deep trench erosion
US-2020243342-A1 · Jul 30, 2020 · US
Method for manufacturing dual-cavity structure, and dual-cavity structure
US-2020216307-A1 · Jul 9, 2020 · US
Manufacturing method of MEMS chip
US-10077188-B2 · Sep 18, 2018 · US
Parallel plate capacitor and acceleration sensor comprising same
US-9903884-B2 · Feb 27, 2018 · US
Manufacturing method of mems chip
US-2017121175-A1 · May 4, 2017 · US
MEMS chip and manufacturing method therefor
US-9580301-B2 · Feb 28, 2017 · US
Recent patents
Latest publications not already listed above.
Parallel plate capacitor and acceleration sensor comprising same
US-2015233965-A1 · Aug 20, 2015 · US
Method for fabricating multi-trench structure
US-2015175409-A1 · Jun 25, 2015 · US
Monitoring structure and monitoring method for silicon wet etching depth
US-9006867-B2 · Apr 14, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Csmc Technologies Fab1 Co Ltd | 8 |
| Csmc Technologies Fab2 Co Ltd | 6 |
| Csmc Technologies Fabi Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B81B7/02 | 5 |
| H04R19/005 | 4 |
| H04R19/04 | 4 |
| H04R2201/003 | 4 |
| B81C1/0038 | 4 |