System and method to monitor semiconductor workpiece temperature using thermal imaging
US-9995631-B2 · Jun 12, 2018 · US
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Wyka Gary E patents
Wyka Gary E is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wyka Gary E |
| Total patents | 3 |
| First publication | Dec 29, 2016 |
| Latest publication | Jun 12, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
System And Method To Monitor Semiconductor Workpiece Temperature Using Thermal Imaging
US-2017356807-A1 · Dec 14, 2017 · US
Vacuum Compatible LED Substrate Heater
US-2016379854-A1 · Dec 29, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Varian Semiconductor Equipment Ass Inc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01J2005/065 | 2 |
| G01J5/047 | 2 |
| G01J5/025 | 2 |
| G01J5/06 | 2 |
| G01J5/0205 | 2 |