Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation
US-12372872-B2 · Jul 29, 2025 · US
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Wise Rich patents
Wise Rich is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wise Rich |
| Total patents | 2 |
| First publication | Jun 23, 2022 |
| Latest publication | Jul 29, 2025 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/2045 | 2 |
| G03F7/11 | 2 |
| G03F7/70033 | 2 |
| G03F7/2004 | 2 |
| G03F7/091 | 2 |