Wetting pretreatment for enhanced damascene metal filling
US-10840101-B2 · Nov 17, 2020 · US
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Willey Mark J patents
Willey Mark J is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Willey Mark J |
| Total patents | 12 |
| First publication | Feb 24, 2015 |
| Latest publication | Nov 17, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Wetting pretreatment for enhanced damascene metal filling
US-2018138044-A1 · May 17, 2018 · US
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte
US-2018030611-A1 · Feb 1, 2018 · US
Wetting pretreatment for enhanced damascene metal filling
US-9852913-B2 · Dec 26, 2017 · US
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte
US-9816196-B2 · Nov 14, 2017 · US
Apparatus for wetting pretreatment for enhanced damascene metal filling
US-9721800-B2 · Aug 1, 2017 · US
Through silicon via filling using an electrolyte with a dual state inhibitor
US-9593426-B2 · Mar 14, 2017 · US
Wetting pretreatment for enhanced damascene metal filling
US-2015179458-A1 · Jun 25, 2015 · US
Through silicon via filling using an electrolyte with a dual state inhibitor
US-2015159289-A1 · Jun 11, 2015 · US
Apparatus for wetting pretreatment for enhanced damascene metal filling
US-2015096883-A1 · Apr 9, 2015 · US
Recent patents
Latest publications not already listed above.
Through silicon via filling using an electrolyte with a dual state inhibitor
US-8992757-B2 · Mar 31, 2015 · US
Wetting pretreatment for enhanced damascene metal filling
US-8962085-B2 · Feb 24, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Novellus Systems Inc | 12 |
| Willey Mark J | 2 |
| Mayer Steven T | 2 |
| Porter David W | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C25D3/38 | 12 |
| H10W20/023 | 10 |
| H10P14/47 | 10 |
| C25D7/123 | 10 |
| C25D17/001 | 9 |