Method for operating an optical system, and optical system
US-2026093089-A1 · Apr 2, 2026 · US
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Von Hodenberg Martin patents
Von Hodenberg Martin is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Von Hodenberg Martin |
| Total patents | 15 |
| First publication | Jun 11, 2015 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Projection exposure apparatus with at least one manipulator
US-10303063-B2 · May 28, 2019 · US
Method of operating a microlithographic projection apparatus
US-10018907-B2 · Jul 10, 2018 · US
Projection exposure apparatus with at least one manipulator
US-2018173100-A1 · Jun 21, 2018 · US
Projection exposure method and projection exposure apparatus for microlithography
US-2018136565-A1 · May 17, 2018 · US
System correction from long timescales
US-9829800-B2 · Nov 28, 2017 · US
Projection exposure method and projection exposure apparatus for microlithography
US-9817316-B2 · Nov 14, 2017 · US
Reflective optical element for EUV lithography and method of manufacturing a reflective optical element
US-9606446-B2 · Mar 28, 2017 · US
Projection exposure method and projection exposure apparatus for microlithography
US-2016209754-A1 · Jul 21, 2016 · US
Projection objective of a microlithographic projection exposure apparatus
US-9372411-B2 · Jun 21, 2016 · US
Recent patents
Latest publications not already listed above.
Microlithographic apparatus
US-9348234-B2 · May 24, 2016 · US
Reflective Optical Element for EUV Lithography and Method of Manufacturing a Reflective Optical Element
US-2015316851-A1 · Nov 5, 2015 · US
Projection exposure apparatus with at least one manipulator
US-9170497-B2 · Oct 27, 2015 · US
Illumination and displacement device for a projection exposure apparatus
US-9134613-B2 · Sep 15, 2015 · US
System correction from long timescales
US-2015160562-A1 · Jun 11, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70891 | 11 |
| G03F7/70258 | 9 |
| G03F7/706 | 8 |
| G03F7/70525 | 6 |
| G03F7/70308 | 3 |