Substrate processing apparatus and method of manufacturing semiconductor device
US-10755962-B2 · Aug 25, 2020 · US
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Ukae Naoki patents
Ukae Naoki is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ukae Naoki |
| Total patents | 3 |
| First publication | Apr 5, 2016 |
| Latest publication | Aug 25, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hitachi Int Electric Inc | 3 |
| Kokusai Electric Corp | 1 |
| Nabeta Kazuya | 1 |
| Ukae Naoki | 1 |
| Takeshita Mitsunori | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7624 | 3 |
| H10P72/0434 | 3 |
| H10P72/7626 | 3 |
| H01J37/32082 | 3 |
| C23C16/458 | 3 |