Method and system for forming silicon nitride on a sidewall of a feature
US-12550644-B2 · Feb 10, 2026 · US
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Ueda Shinya patents
Ueda Shinya is listed as an inventor on 48 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ueda Shinya |
| Total patents | 48 |
| First publication | Jan 29, 2015 |
| Latest publication | Feb 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Positioning apparatus and positioning method
US-12517267-B2 · Jan 6, 2026 · US
Silicon nitride and silicon oxide deposition methods using fluorine inhibitor
US-12431354-B2 · Sep 30, 2025 · US
Thin-film deposition method and system
US-12392038-B2 · Aug 19, 2025 · US
Gas generator
US-2025136034-A1 · May 1, 2025 · US
Gas generator
US-12214741-B2 · Feb 4, 2025 · US
Display system and content display method
US-2025010718-A1 · Jan 9, 2025 · US
Positioning apparatus and positioning method
US-2024219582-A1 · Jul 4, 2024 · US
Advertisement management system and advertisement management method
US-2024185303-A1 · Jun 6, 2024 · US
Gas generator
US-2024149824-A1 · May 9, 2024 · US
Recent patents
Latest publications not already listed above.
Position information transmission device, position information transmission method, and program
US-11889820-B2 · Feb 6, 2024 · US
Substrate processing apparatus and method of fabricating the same
US-2023323558-A1 · Oct 12, 2023 · US
Method for forming silicon nitride film selectively on top/bottom portions
US-11676812-B2 · Jun 13, 2023 · US
Gas generator
US-11667261-B2 · Jun 6, 2023 · US
Position information transmission device, position information transmission method, and program
US-2022322641-A1 · Oct 13, 2022 · US
Method of depositing material onto a surface and structure formed according to the method
US-11355338-B2 · Jun 7, 2022 · US
Method and system for forming silicon nitride on a sidewall of a feature
US-2022108881-A1 · Apr 7, 2022 · US
Silicon nitride and silicon oxide deposition methods using fluorine inhibitor
US-2022005693-A1 · Jan 6, 2022 · US
Gas generator
US-11110885-B2 · Sep 7, 2021 · US
Gas generator
US-2021221324-A1 · Jul 22, 2021 · US
Cooker
US-11067289-B2 · Jul 20, 2021 · US
Method of forming a structure including silicon oxide
US-2021143003-A1 · May 13, 2021 · US
Gas generator
US-11001224-B2 · May 11, 2021 · US
Cooker
US-2021088222-A1 · Mar 25, 2021 · US
Heating cooker
US-10845058-B2 · Nov 24, 2020 · US
Method of depositing material onto a surface and structure formed according to the method
US-2020357631-A1 · Nov 12, 2020 · US
Method for forming silicon nitride film selectively on top/bottom portions
US-2020321209-A1 · Oct 8, 2020 · US
Gas generator
US-10759377-B2 · Sep 1, 2020 · US
Gas generator
US-10730474-B2 · Aug 4, 2020 · US
Method for forming silicon nitride film selectively on top surface
US-10720322-B2 · Jul 21, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 18 |
| Nippon Kayaku Kk | 14 |
| Sharp Kk | 8 |
| Sharp Nec Display Solutions Ltd | 4 |
| Mitsubishi Electric Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6339 | 17 |
| H10P14/6336 | 17 |
| H10P14/69433 | 16 |
| H01L21/0217 | 15 |
| H10P14/6682 | 14 |