Feedback control systems for impedance matching
US-2025246406-A1 · Jul 31, 2025 · US
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Topping Stephen patents
Topping Stephen is listed as an inventor on 16 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Topping Stephen |
| Total patents | 16 |
| First publication | Sep 26, 2019 |
| Latest publication | Jul 31, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer placement correction in indexed multi-station processing chambers
US-2025125169-A1 · Apr 17, 2025 · US
Showerhead faceplate configurations
US-2025054734-A1 · Feb 13, 2025 · US
Wafer placement correction in indexed multi-station processing chambers
US-12217985-B2 · Feb 4, 2025 · US
Method and apparatus for radio frequency grid design in an esc to reduce film asymmetry
US-2025038034-A1 · Jan 30, 2025 · US
Balancing gas flow to multiple stations using heaters upstream of flow restrictors
US-2024401202-A1 · Dec 5, 2024 · US
Rotational indexers with wafer centering capability
US-2024213070-A1 · Jun 27, 2024 · US
Monolithic anisotropic substrate supports
US-2024128062-A1 · Apr 18, 2024 · US
Protective coating for electrostatic chucks
US-2024045344-A1 · Feb 8, 2024 · US
Protective coating for electrostatic chucks
US-11835868-B2 · Dec 5, 2023 · US
Recent patents
Latest publications not already listed above.
Showerhead with faceplate having internal contours
US-2023044064-A1 · Feb 9, 2023 · US
Frequency based impedance adjustment in tuning circuits
US-2022375719-A1 · Nov 24, 2022 · US
Wafer placement correction in indexed multi-station processing chambers
US-2022172967-A1 · Jun 2, 2022 · US
Protective coating for electrostatic chucks
US-2021333715-A1 · Oct 28, 2021 · US
Protective coating for electrostatic chucks
US-11086233-B2 · Aug 10, 2021 · US
Protective coating for electrostatic chucks
US-2019294050-A1 · Sep 26, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 16 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 8 |
| H10P72/7614 | 8 |
| H01L21/6833 | 7 |
| H10P72/7616 | 6 |
| H10P72/72 | 5 |