Auto-calibration to a station of a process module that spins a wafer
US-2026076140-A1 · Mar 12, 2026 · US
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Thaulad Peter patents
Thaulad Peter is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Thaulad Peter |
| Total patents | 13 |
| First publication | Feb 2, 2017 |
| Latest publication | Mar 12, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Auto-calibration to a station of a process module that spins a wafer
US-12489006-B2 · Dec 2, 2025 · US
Fixture for automatic calibration of substrate transfer robot
US-12168301-B2 · Dec 17, 2024 · US
Auto-calibration to a station of a process module that spins a wafer
US-2023395410-A1 · Dec 7, 2023 · US
Auto-calibration to a station of a process module that spins a wafer
US-11742229-B2 · Aug 29, 2023 · US
Fixture for automatic calibration of substrate transfer robot
US-2022134568-A1 · May 5, 2022 · US
Auto-calibration to a station of a process module that spins a wafer
US-2022108902-A1 · Apr 7, 2022 · US
Auto-calibration to a station of a process module that spins a wafer
US-11239100-B2 · Feb 1, 2022 · US
Auto-calibration to a station of a process module that spins a wafer
US-2020273731-A1 · Aug 27, 2020 · US
Auto-calibration to a station of a process module that spins a wafer
US-10651065-B2 · May 12, 2020 · US
Recent patents
Latest publications not already listed above.
Auto-calibration to a station of a process module that spins a wafer
US-2019172738-A1 · Jun 6, 2019 · US
Vision-based wafer notch position measurement
US-9831110-B2 · Nov 28, 2017 · US
Vision-based wafer notch position measurement
US-2017032510-A1 · Feb 2, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/53 | 13 |
| H10P72/3302 | 11 |
| H10P72/0466 | 11 |
| H10P72/0606 | 11 |
| H10P72/72 | 9 |