Mask metrology measuring device and method for examining a photomask
US-2025369899-A1 · Dec 4, 2025 · US
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Thaler Thomas patents
Thaler Thomas is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Thaler Thomas |
| Total patents | 17 |
| First publication | Jan 3, 2017 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus and method for characterizing a microlithographic mask
US-2024152057-A1 · May 9, 2024 · US
Apparatus and method for characterizing a microlithographic mask
US-11914303-B2 · Feb 27, 2024 · US
Method for measuring photomasks
US-11899358-B2 · Feb 13, 2024 · US
Brake Application Mechanism of a Disc Brake
US-2023375050-A1 · Nov 23, 2023 · US
Apparatus and method for characterizing a microlithographic mask
US-2021397099-A1 · Dec 23, 2021 · US
Method for measuring photomasks
US-2021255541-A1 · Aug 19, 2021 · US
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
US-10788748-B2 · Sep 29, 2020 · US
Method and device for characterizing a mask for microlithography
US-10698318-B2 · Jun 30, 2020 · US
Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography
US-10578975-B2 · Mar 3, 2020 · US
Recent patents
Latest publications not already listed above.
Method and device for determining an OPC model
US-10539865-B2 · Jan 21, 2020 · US
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
US-2019107776-A1 · Apr 11, 2019 · US
Method for Correcting the Critical Dimension Uniformity of a Photomask for Semiconductor Lithography
US-2019107783-A1 · Apr 11, 2019 · US
Method and device for characterizing a mask for microlithography
US-2019011839-A1 · Jan 10, 2019 · US
Method and device for determining an opc model
US-2018095358-A1 · Apr 5, 2018 · US
Method and device for examining a mask
US-9869640-B2 · Jan 16, 2018 · US
Emulation of reproduction of masks corrected by local density variations
US-9535244-B2 · Jan 3, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 16 |
| Zeiss Carl Sms Ltd | 3 |
| Knorr Bremse Systeme Fuer Nutzfahrzeuge Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/84 | 14 |
| G01N21/956 | 9 |
| G01N2021/95676 | 7 |
| G01N21/8851 | 5 |
| G03F1/72 | 5 |