Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
US-10018803-B2 · Jul 10, 2018 · US
This page is not indexed by search engines while we improve data quality.
Specht Joerg patents
Specht Joerg is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Specht Joerg |
| Total patents | 4 |
| First publication | Aug 25, 2016 |
| Latest publication | Jul 10, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Device for determining a tilt angle of at least one mirror of a lithography system, and method
US-10007195-B2 · Jun 26, 2018 · US
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
US-2017038555-A1 · Feb 9, 2017 · US
Device for determining a tilt angle of at least one mirror of a lithography system, and method
US-2016246186-A1 · Aug 25, 2016 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70075 | 4 |
| G03F7/7085 | 4 |
| G03F7/70116 | 4 |
| G02B26/0833 | 2 |
| G03F7/70616 | 2 |