Advanced in-situ particle detection system for semiconductor substrate processing systems
US-10883932-B2 · Jan 5, 2021 · US
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Smith Patrick L patents
Smith Patrick L is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Smith Patrick L |
| Total patents | 7 |
| First publication | Apr 20, 2017 |
| Latest publication | Jan 5, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Advanced in-situ particle detection system for semiconductor substrate processing systems
US-2019323960-A1 · Oct 24, 2019 · US
Advanced in-situ particle detection system for semiconductor substrate processing systems
US-10365216-B2 · Jul 30, 2019 · US
Chamber leak and gas contaimination detection
US-10269601-B2 · Apr 23, 2019 · US
Advanced in-situ particle detection system for semiconductor substrate processing systems
US-2018156727-A1 · Jun 7, 2018 · US
Systems and methods for prioritizing funding of projects
US-9953284-B2 · Apr 24, 2018 · US
Chamber leak and gas contaimination detection
US-2017107610-A1 · Apr 20, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 6 |
| Aerospace Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0604 | 6 |
| H01L21/67253 | 5 |
| H10P72/3411 | 4 |
| H10P72/0402 | 4 |
| G01N1/2247 | 4 |