MEMS-based Coriolis mass flow controller
US-11860016-B2 · Jan 2, 2024 · US
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Smith Dennis patents
Smith Dennis is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Smith Dennis |
| Total patents | 15 |
| First publication | Jul 3, 2018 |
| Latest publication | Jan 2, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Catalyst-free method for degrading dioxane in alkyl ether sulfate vacuum removal water
US-11827544-B2 · Nov 28, 2023 · US
MEMS coriolis gas flow controller
US-11662237-B2 · May 30, 2023 · US
Catalyst-free method for degrading dioxane in alkyl ether sulfate vacuum removal water
US-2023116436-A1 · Apr 13, 2023 · US
Component with protective surface for processing chamber
US-2023081544-A1 · Mar 16, 2023 · US
Semiconductor equipment module fabrication with additive manufacturing
US-2022384145-A1 · Dec 1, 2022 · US
Mems coriolis gas flow controller
US-2021140807-A1 · May 13, 2021 · US
Mems-based coriolis mass flow controller
US-2021096011-A1 · Apr 1, 2021 · US
Manufacture of an orifice plate for use in gas calibration
US-10737359-B2 · Aug 11, 2020 · US
Turbomolecular pump deposition control and particle management
US-10655638-B2 · May 19, 2020 · US
Recent patents
Latest publications not already listed above.
Mass flow controller for substrate processing
US-10591934-B2 · Mar 17, 2020 · US
Manufacture of an orifice plate for use in gas calibration
US-2019308286-A1 · Oct 10, 2019 · US
Turbomolecular pump deposition control and particle management
US-2019285090-A1 · Sep 19, 2019 · US
Mass Flow Controller for Substrate Processing
US-2019279888-A1 · Sep 12, 2019 · US
Chair
US-D821791-S · Jul 3, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 12 |
| Stepan Co | 2 |
| Steelcase Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01F1/8445 | 6 |
| G01F15/005 | 6 |
| H10P72/0402 | 5 |
| G01F1/845 | 4 |
| G01F1/8427 | 4 |